EP 1145292 A1 20011017 - SUBSTRATE CARRIER
Title (en)
SUBSTRATE CARRIER
Title (de)
SUBSTRATHALTER
Title (fr)
SUPPORT DE SUBSTRAT
Publication
Application
Priority
- DE 19859467 A 19981222
- EP 9909942 W 19991215
Abstract (en)
[origin: DE19859467A1] The invention relates to a substrate carrier for holding substrates, especially semiconductor wafers. Good sealing of the wafer surface and electrical contact are made possible in that the substrate carrier has a first and a second part having a central opening matching the form of the substrate, wherein the substrate is received between the first and the second part and a peripheral seal having at least one undercut is provided in the inner periphery of the second part.
IPC 1-7
IPC 8 full level
B65D 85/86 (2006.01); C25D 17/06 (2006.01); F16J 15/10 (2006.01); H01L 21/00 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01)
CPC (source: EP KR US)
H01L 21/67126 (2013.01 - EP US); H01L 21/68 (2013.01 - KR); H01L 21/68721 (2013.01 - EP US)
Citation (search report)
See references of WO 0038222A1
Designated contracting state (EPC)
AT BE DE FR GB IT
DOCDB simple family (publication)
DE 19859467 A1 20000706; DE 19859467 C2 20021128; EP 1145292 A1 20011017; JP 2002540011 A 20021126; KR 20010086153 A 20010908; US 6569302 B1 20030527; WO 0038222 A1 20000629
DOCDB simple family (application)
DE 19859467 A 19981222; EP 9909942 W 19991215; EP 99963537 A 19991215; JP 2000590201 A 19991215; KR 20017008055 A 20010622; US 86921901 A 20010622