EP 1151479 A2 20011107 - OPTICAL DETECTOR WITH A FILTER LAYER MADE OF POROUS SILICON AND METHOD FOR THE PRODUCTION THEREOF
Title (en)
OPTICAL DETECTOR WITH A FILTER LAYER MADE OF POROUS SILICON AND METHOD FOR THE PRODUCTION THEREOF
Title (de)
OPTISCHER DETEKTOR MIT EINER FILTERSCHICHT AUS PORÖSEM SILIZIUM UND HERSTELLUNGSVERFAHREN DAZU
Title (fr)
DETECTEUR OPTIQUE DOTE D'UNE COUCHE FILTRE CONSTITUEE DE SILICIUM POREUX ET PROCEDE DE FABRICATION DUDIT DETECTEUR
Publication
Application
Priority
- DE 9904096 W 19991224
- DE 19900879 A 19990112
Abstract (en)
[origin: WO0041456A2] A optical silicon-based detector with a porous filter layer that has a laterally modifiable filter effect, comprising a plurality of integrated photosensitive cells. The invention also relates to a method for the production of an optical detector by creating an insulating layer on the porous filter layer and by providing active filter surfaces.
IPC 1-7
IPC 8 full level
G01J 3/51 (2006.01); G01J 1/02 (2006.01); G01J 1/04 (2006.01); G01J 3/12 (2006.01); G01J 3/26 (2006.01); G02B 5/18 (2006.01); H01L 21/00 (2006.01); H01L 31/0216 (2006.01); H01L 31/028 (2006.01); H01L 31/10 (2006.01)
IPC 8 main group level
H01L (2006.01)
CPC (source: EP US)
H01L 31/02165 (2013.01 - EP US); H01L 31/08 (2013.01 - EP US); H01L 31/108 (2013.01 - EP US); H01L 31/1085 (2013.01 - EP US); H01L 31/1804 (2013.01 - EP US); Y02E 10/547 (2013.01 - US); Y02P 70/50 (2015.11 - EP US); Y10S 438/96 (2013.01 - EP US)
Citation (search report)
See references of WO 0041456A2
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 0041456 A2 20000720; WO 0041456 A3 20001019; WO 0041456 A9 20010927; CA 2355217 A1 20000720; DE 19900879 A1 20000817; EP 1151479 A2 20011107; JP 2003505856 A 20030212; US 6689633 B1 20040210
DOCDB simple family (application)
DE 9904096 W 19991224; CA 2355217 A 19991224; DE 19900879 A 19990112; EP 99967910 A 19991224; JP 2000593082 A 19991224; US 88913401 A 20010924