EP 1153262 A1 20011114 - METHOD OF INFORMATION COLLECTION AND PROCESSING OF SAMPLE'S SURFACE
Title (en)
METHOD OF INFORMATION COLLECTION AND PROCESSING OF SAMPLE'S SURFACE
Title (de)
VERFAHREN ZUR INFORMATIONSSAMMLUNG UND BEARBEITUNG VON OBERFLÄCHENPROBEN
Title (fr)
PROCEDE DE RECUEIL D'INFORMATIONS ET DE TRAITEMENT DE LA SURFACE D'UN ECHANTILLON
Publication
Application
Priority
- RU 0000040 W 20000207
- RU 99102369 A 19990208
Abstract (en)
[origin: US6776030B1] The applied method is implemented in AFM[-microscopy] to get space distributions of surface properties and layers, placed on it. This method includes successive reading in predetermined points of the surface under control of force curve and subsequent constructions of images of appropriate distributions of parameters extracted from these force curves. The peculiarity of the method is that reading of force curve is carried out by noting of values of cantilever's deviation force and/or coordinate of its fixed end and/or derivatives from cantilever's deviation force of coordinate of its fixed end at least in points of control of force curve. Upon that, characteristics and parameters of sample's surface and/or surface layers, for instance, presence, quantity and thickness of surface layers, coordinates of sample's surface and limits of surface layers, as well as adhesion, elastic and friction properties of surface and layers, are diagnosed by a number of points of control and/or noted values of cantilever's deviation force and/or coordinate of its fixed end and/or derivatives from cantilever's deviation force of coordinate of its fixed end in appropriate points,
IPC 1-7
IPC 8 full level
G01B 1/00 (2006.01); G01B 7/34 (2006.01); G01B 21/30 (2006.01); G01Q 10/06 (2010.01); G01Q 60/24 (2010.01); G12B 21/08 (2006.01); G12B 21/20 (2006.01)
CPC (source: EP US)
G01Q 30/04 (2013.01 - EP US)
Citation (search report)
See references of WO 0046568A2
Designated contracting state (EPC)
AT DE ES FR IT
DOCDB simple family (publication)
US 6776030 B1 20040817; AU 2835000 A 20000825; CA 2361759 A1 20000810; CA 2361759 C 20050927; EP 1153262 A1 20011114; RU 2145055 C1 20000127; WO 0046568 A2 20000810; WO 0046568 A3 20001221
DOCDB simple family (application)
US 89026501 A 20010808; AU 2835000 A 20000207; CA 2361759 A 20000207; EP 00906791 A 20000207; RU 0000040 W 20000207; RU 99102369 A 19990208