EP 1155438 A1 20011121 - DEVICE FOR TRANSPORTING OBJECTS
Title (en)
DEVICE FOR TRANSPORTING OBJECTS
Title (de)
VORRICHTUNG ZUM TRANSPORT VON GEGENSTÄNDEN
Title (fr)
DISPOSITIF DESTINE AU TRANSPORT D'OBJETS
Publication
Application
Priority
- DE 0000187 W 20000122
- DE 19905882 A 19990211
Abstract (en)
[origin: WO0048233A1] The invention relates to a device (1) for transporting objects between a first clean room (4) and a second clean room (5) which can belong to different classes of clean rooms and in which different air pressures prevail. The inventive device comprises the following components: A vertical transporting device (6) which is guided through an opening (7) situated in a ceiling (3) of the first clean room (4) and situated in a floor of the second clean room (5); a vertically travelling transport element (8) of the vertical transport device that has a first final position which is located inside the first clean room (4) and has a second final position which is located in the second clean room (5); a lock device (9) which occludes the cross section of the vertical transport device (6), said lock device comprising at least two lock doors (10, 11) which are interspaced in a direction of transport and which delimit a chamber of the lock (13) located therebetween, and; at least one transfer device with which an object can be transferred from a transport system located in the second clean room (5) to the transport element (8) located in the second final position thereof and can be transferred in an opposite direction, and/or with which the object can be transferred from the transport element (8) located in the final position thereof to a processing station located in the first clean room (4) and can be transferred in an opposite direction, whereby one of the final positions of the transport element (8) is arranged inside the chamber of the lock.
IPC 1-7
IPC 8 full level
B65G 49/07 (2006.01); H01L 21/677 (2006.01)
CPC (source: EP)
H01L 21/67727 (2013.01); H01L 21/6773 (2013.01); B65G 2249/02 (2013.01)
Citation (search report)
See references of WO 0048233A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 0048233 A1 20000817; AU 2902800 A 20000829; DE 10080316 D2 20020307; DE 19905882 C1 20001221; EP 1155438 A1 20011121
DOCDB simple family (application)
DE 0000187 W 20000122; AU 2902800 A 20000122; DE 10080316 T 20000122; DE 19905882 A 19990211; EP 00907437 A 20000122