EP 1157402 B1 20040506 - ELECTRON EMITTER AND METHOD FOR PRODUCING THE SAME
Title (en)
ELECTRON EMITTER AND METHOD FOR PRODUCING THE SAME
Title (de)
ELEKTRONENEMITTER UND VERFAHREN ZU DESSEN HERSTELLUNG
Title (fr)
EMETTEUR D'ELECTRONS ET SON PROCEDE DE PRODUCTION
Publication
Application
Priority
- DE 0000570 W 20000225
- DE 19910156 A 19990226
Abstract (en)
[origin: DE19910156A1] The invention relates to an electron emitter that is provided with conductive cylindrical areas which are located in an insulating layer that is arranged on a substrate. Said areas are arranged vertically in relation to the surface of the layer, are evenly formed over the entire thickness of the layer, are parallel to each other and are configured as homogeneously conducting channels. According to the method for producing such an electron emitter, an insulating layer having a thickness of 40 nm and 1,000 nm is mounted on a substrate. Said layer is then exposed to homogeneous radiation of heavy ions vertically in relation to the surface of the layer. The ions are provided with high energy that guarantees a sufficiently high energy deposition for restructuring the insulating layer over the entire thickness thereof. The ions are provided with a dose with a mean distance of the ions which statistically strike into the insulating layer. Said distance is between 20 nm and 1,000 nm.
IPC 1-7
IPC 8 full level
H01J 1/30 (2006.01); H01J 1/304 (2006.01); H01J 9/02 (2006.01)
CPC (source: EP KR)
H01J 1/30 (2013.01 - KR); H01J 1/304 (2013.01 - EP); H01J 9/025 (2013.01 - EP)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
DE 19910156 A1 20000907; DE 19910156 C2 20020718; DE 50006333 D1 20040609; EP 1157402 A1 20011128; EP 1157402 B1 20040506; HK 1044071 A1 20021004; HK 1044071 B 20050204; JP 2002538594 A 20021112; KR 100588738 B1 20060612; KR 20010102258 A 20011115; WO 0052725 A1 20000908
DOCDB simple family (application)
DE 19910156 A 19990226; DE 0000570 W 20000225; DE 50006333 T 20000225; EP 00912394 A 20000225; HK 02103984 A 20020528; JP 2000603064 A 20000225; KR 20017010531 A 20010818