EP 1158316 B1 20030723 - Use of a diffraction grating with a high aspect ratio
Title (en)
Use of a diffraction grating with a high aspect ratio
Title (de)
Verwendung eines Beugungsgitters mit hohem Aspektverhältnis
Title (fr)
Utilisation d'un réseau de diffraction à haut facteur de forme
Publication
Application
Priority
DE 10025694 A 20000524
Abstract (en)
[origin: EP1158316A1] Diffraction grating comprises a number of parallel diffraction structures arranged on a support and each comprising a frame (3) extending from the base surface of the support. The frame has a rectangular cross-section and the width (w) of the frame measured vertical to the central plane (7) of the frame and parallel to the base surface is less than 100, preferably 20-60, especially 50 nm. Preferred Features: The height (D) of the frame over the base surface is more than 200, preferably 200-600 nm. The grating is made from doped quartz, comprises a dielectric layer system made up of layers of Al2O3 and MgF2 or LaF3 and MgF2, and has a coating made from aluminum.
IPC 1-7
IPC 8 full level
G02B 5/18 (2006.01)
CPC (source: EP US)
G02B 5/1814 (2013.01 - EP US); G02B 5/1838 (2013.01 - EP US); G02B 5/1861 (2013.01 - EP US); G03H 1/0244 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB NL
DOCDB simple family (publication)
EP 1158316 A1 20011128; EP 1158316 B1 20030723; DE 10025694 A1 20020307; DE 10025694 C2 20030605; DE 50100398 D1 20030828; JP 2002006126 A 20020109; TW I244560 B 20051201; US 2002024735 A1 20020228; US 6600602 B2 20030729
DOCDB simple family (application)
EP 01110569 A 20010430; DE 10025694 A 20000524; DE 50100398 T 20010430; JP 2001155236 A 20010524; TW 90110863 A 20010531; US 86374501 A 20010523