Global Patent Index - EP 1161765 A1

EP 1161765 A1 2001-12-12 - DEVICE FOR TREATING SUBSTRATES

Title (en)

DEVICE FOR TREATING SUBSTRATES

Title (de)

VORRICHTUNG ZUM BEHANDELN VON SUBSTRATEN

Title (fr)

DISPOSITIF DE TRAITEMENT DE SUBSTRATS

Publication

EP 1161765 A1 (DE)

Application

EP 00918768 A

Priority

  • DE 19911084 A
  • EP 0001984 W

Abstract (en)

[origin: DE19911084A1] The invention relates to a device for treating substrates, especially semiconductor wafers, with at least one processing container that is provided with an opening which can be closed from the exterior during the treatment with the substrate. The aim of the invention is to provide a simple and homogeneous treatment of a surface pertaining to a substrate. The aim of the invention is also to reduce the danger of damage between successive treatment steps. To this end, a second processing container is provided adjacent to the first processing container. The wall of said second processing container is at least partially the container wall of the first processing container, whereby said container wall is provided with the opening which can be closed from the side of the first processing container.

IPC 1-7 (main, further and additional classification)

H01L 21/00; C25D 7/12

IPC 8 full level (invention and additional information)

C25D 7/12 (2006.01); C25D 17/00 (2006.01); C25D 17/08 (2006.01); H01L 21/00 (2006.01)

CPC (invention and additional information)

H01L 21/67023 (2013.01)

Citation (search report)

See references of WO 0055888A1

Designated contracting state (EPC)

AT DE

EPO simple patent family

DE 19911084 A1 20000921; DE 19911084 C2 20020131; EP 1161765 A1 20011212; JP 2002539334 A 20021119; TW 472316 B 20020111; WO 0055888 A1 20000921

INPADOC legal status


2005-04-06 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20041001

2004-05-26 [RBV] DESIGNATED CONTRACTING STATES (CORRECTION)

- Designated State(s): AT DE

2001-12-12 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20010915

2001-12-12 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE