EP 1164127 A1 20011219 - PROCESS FOR PRODUCING ONIUM SALT DERIVATIVE AND NOVEL ONIUM SALT DERIVATIVE
Title (en)
PROCESS FOR PRODUCING ONIUM SALT DERIVATIVE AND NOVEL ONIUM SALT DERIVATIVE
Title (de)
VERFAHREN ZUR HERSTELLUNG EINES ONIUM-SALZ-DERIVATES UND EIN NEUES ONIUM-SALZ DERIVAT
Title (fr)
PROCEDE DE PRODUCTION DE DERIVE DE SEL D'ONIUM ET NOUVEAU DERIVE DE SEL D'ONIUM
Publication
Application
Priority
- JP 0008488 W 20001201
- JP 34548899 A 19991203
- JP 2000065213 A 20000309
- JP 2000260928 A 20000830
- JP 2000284186 A 20000919
- JP 2000286306 A 20000921
Abstract (en)
The invention provides a high-yield method for producing onium salt derivatives useful as agents, such as acid-generators, employed in chemically amplified resists; and to provide novel onium salt derivatives. Reaction of an onium salt derivative containing a halide anion or a carboxylate anion with a sulfonic acid ester derivative or a phosphoric acid derivative provides an onium sulfate derivative or an onium phosphate derivative at high yield.
IPC 1-7
C07C 305/04; C07C 309/29; C07C 309/30; C07C 309/33; C07C 309/39; C07C 309/04; C07C 309/06; C07C 309/25; C07C 25/18; C07C 381/12; C07F 9/09; C07C 309/24
IPC 8 full level
C07C 25/02 (2006.01); C07C 25/18 (2006.01); C07C 303/32 (2006.01); C07C 305/04 (2006.01); C07C 309/04 (2006.01); C07C 309/06 (2006.01); C07C 309/24 (2006.01); C07C 309/25 (2006.01); C07C 309/29 (2006.01); C07C 309/30 (2006.01); C07C 309/33 (2006.01); C07C 309/39 (2006.01); C07C 381/12 (2006.01); C07F 9/09 (2006.01); C07F 9/40 (2006.01); C07C 305/06 (2006.01); C07C 309/23 (2006.01); C07C 309/43 (2006.01)
CPC (source: EP KR US)
C07C 25/02 (2013.01 - EP US); C07C 25/18 (2013.01 - EP US); C07C 303/24 (2013.01 - EP US); C07C 303/32 (2013.01 - EP US); C07C 381/12 (2013.01 - EP US); C07F 9/09 (2013.01 - EP KR US); C07F 9/4075 (2013.01 - EP US); C07C 2602/42 (2017.04 - EP US)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
EP 1164127 A1 20011219; EP 1164127 A4 20050601; CN 1177818 C 20041201; CN 1339024 A 20020306; HK 1042473 A1 20020816; KR 100646739 B1 20061117; KR 20010101960 A 20011115; TW I260673 B 20060821; US 2005176982 A1 20050811; US 6620957 B1 20030916; US 7335787 B2 20080226; WO 0140167 A1 20010607
DOCDB simple family (application)
EP 00978041 A 20001201; CN 00803448 A 20001201; HK 02104327 A 20020608; JP 0008488 W 20001201; KR 20017009794 A 20010803; TW 89125600 A 20001201; US 66025503 A 20030911; US 89084201 A 20010803