EP 1164207 A2 20011219 - Method for preparing metal oxide film
Title (en)
Method for preparing metal oxide film
Title (de)
Verfahren zur Herstellung einer Metalloxydschicht
Title (fr)
Procédé de preparation d'un film d'oxyde métallique
Publication
Application
Priority
JP 2000162454 A 20000531
Abstract (en)
A method for preparing a metal oxide film using a sol-gel method including the steps of: forming a solution containing a complex including a metal oxide oligomer and an organic solvent; depositing the solution on a substrate; removing at least part of the organic solvent from the solution on the substrate; and thermally treating the substrate for converting the metal oxide oligomer into the corresponding metal oxide film. In this method, since at least part of the solvent in the oligomer-solvent complex is removed before converting the metal oxide oligomer into the metal oxide film by the thermal treatment, the mutual diffusion between the substrate metal and in the metal oxide oligomer is prevented to provide a crack-free homogeneous metal oxide film on the substrate. <IMAGE>
IPC 1-7
IPC 8 full level
C01G 1/02 (2006.01); C01B 33/12 (2006.01); C01G 19/02 (2006.01); C01G 23/00 (2006.01); C01G 23/04 (2006.01); C01G 25/00 (2006.01); C07C 31/30 (2006.01); C07F 7/00 (2006.01); C07F 7/02 (2006.01); C07F 7/22 (2006.01); C07F 7/28 (2006.01); C23C 18/12 (2006.01); C23C 22/06 (2006.01)
CPC (source: EP KR US)
C23C 18/1216 (2013.01 - EP); C23C 18/1254 (2013.01 - EP US); C23C 18/143 (2019.04 - EP US); C23C 22/06 (2013.01 - KR)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 1164207 A2 20011219; EP 1164207 A3 20040324; JP 2001342019 A 20011211; JP 3985887 B2 20071003; KR 20010096478 A 20011107
DOCDB simple family (application)
EP 00308173 A 20000919; JP 2000162454 A 20000531; KR 20000055028 A 20000919