Global Patent Index - EP 1164207 A2

EP 1164207 A2 2001-12-19 - Method for preparing metal oxide film

Title (en)

Method for preparing metal oxide film

Title (de)

Verfahren zur Herstellung einer Metalloxydschicht

Title (fr)

Procédé de preparation d'un film d'oxyde métallique

Publication

EP 1164207 A2 (EN)

Application

EP 00308173 A

Priority

JP 2000162454 A

Abstract (en)

A method for preparing a metal oxide film using a sol-gel method including the steps of: forming a solution containing a complex including a metal oxide oligomer and an organic solvent; depositing the solution on a substrate; removing at least part of the organic solvent from the solution on the substrate; and thermally treating the substrate for converting the metal oxide oligomer into the corresponding metal oxide film. In this method, since at least part of the solvent in the oligomer-solvent complex is removed before converting the metal oxide oligomer into the metal oxide film by the thermal treatment, the mutual diffusion between the substrate metal and in the metal oxide oligomer is prevented to provide a crack-free homogeneous metal oxide film on the substrate. <IMAGE>

IPC 1-7 (main, further and additional classification)

C23C 18/12

IPC 8 full level (invention and additional information)

C01G 1/02 (2006.01); C01B 33/12 (2006.01); C01G 19/02 (2006.01); C01G 23/00 (2006.01); C01G 23/04 (2006.01); C01G 25/00 (2006.01); C07C 31/30 (2006.01); C07F 7/00 (2006.01); C07F 7/02 (2006.01); C07F 7/22 (2006.01); C07F 7/28 (2006.01); C23C 18/12 (2006.01); C23C 22/06 (2006.01)

CPC (invention and additional information)

C23C 18/1254 (2013.01); C23C 18/1216 (2013.01); C23C 18/14 (2013.01)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

EP 1164207 A2 20011219; EP 1164207 A3 20040324; JP 2001342019 A 20011211; JP 3985887 B2 20071003; KR 20010096478 A 20011107

INPADOC legal status


2004-10-27 [18W] WITHDRAWN

- Effective date: 20040902

2004-03-24 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A3

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

2004-03-24 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Countries: AL LT LV MK RO SI

2002-07-17 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20020515

2001-12-19 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

2001-12-19 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Free text: AL;LT;LV;MK;RO;SI