EP 1167772 A1 20020102 - VACUUM PUMP
Title (en)
VACUUM PUMP
Title (de)
VAKUUMPUMPE
Title (fr)
POMPE A VIDE
Publication
Application
Priority
- JP 0002061 W 20000331
- JP 9400799 A 19990331
Abstract (en)
Disclosed is a vacuum pump equipped with a thread groove pump portion, wherein the rotor cylindrical body and the stator cylindrical body are reliably prevented from coming abnormally close to or into contact with each other. A composite type turbo-molecular pump is composed of a rotor cylindrical body 12 and a stator cylindrical body 22 and equipped with a thread groove pump portion in which a thread is formed in the inner peripheral surface 22a of the stator cylindrical body 22, wherein there is provided in the portion of the inner peripheral surface 22a of the stator cylindrical body 22 in the vicinity of the lower end thereof an air gap sensor for detecting an air gap formed between the outer peripheral surface 12a of the rotor cylindrical body 12 and the inner peripheral surface 22a of the stator cylindrical body 22. <IMAGE>
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01); F04D 27/02 (2006.01)
CPC (source: EP KR)
F04D 19/04 (2013.01 - KR); F04D 19/044 (2013.01 - EP); F04D 19/048 (2013.01 - EP); F04D 27/0292 (2013.01 - EP)
Citation (search report)
See references of WO 0058628A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 1167772 A1 20020102; JP 2000291586 A 20001017; KR 20020001816 A 20020109; WO 0058628 A1 20001005
DOCDB simple family (application)
EP 00913011 A 20000331; JP 0002061 W 20000331; JP 9400799 A 19990331; KR 20017012575 A 20010929