EP 1169492 A2 20020109 - METHOD OF PRODUCING THIN, POORLY SOLUBLE COATINGS
Title (en)
METHOD OF PRODUCING THIN, POORLY SOLUBLE COATINGS
Title (de)
VERFAHREN ZUR HERSTELLUNG DÜNNER, SCHWER LÖSLICHER BESCHICHTUNGEN
Title (fr)
PROCEDE DE REALISATION DE REVETEMENTS MINCES ET DIFFICILEMENT SOLUBLES
Publication
Application
Priority
- DE 0001173 W 20000406
- DE 19916403 A 19990406
Abstract (en)
[origin: US8158204B1] For making ceramic or oxidic layers (CL/OL) on substrates (S), the method according to the invention therefore provides that following application (I) and drying (II) of a suitable precursor (P) the formed precursor layer (PLD) is gassed (III) with a moist reactant gas (RG) for conversion into a corresponding hydroxide or complex layer (HL) and then thermally treated (IV) for forming a ceramic or oxidic layer (CL/OL). For the alternative production of other chalcogenidic layers of increased material conversion additional gassing is carried out with a reactant gas containing chalcogen hydrogen. Metallic layers may alternatively be made by use of a reducing reactant gas. The methods in accordance with the invention may be used wherever surfaces, even those of shaded structures, must be protected or modified or provided with functional layers, particularly in solar and materials technology.
IPC 1-7
IPC 8 full level
C01G 11/02 (2006.01); C23C 8/06 (2006.01); C23C 8/10 (2006.01); C01G 9/02 (2006.01); C23C 8/80 (2006.01); C23C 26/00 (2006.01); H01L 21/368 (2006.01); H01L 31/18 (2006.01)
CPC (source: EP KR US)
C23C 8/02 (2013.01 - KR); C23C 8/08 (2013.01 - KR); C23C 8/10 (2013.01 - EP US); C23C 8/80 (2013.01 - KR); C23C 26/00 (2013.01 - EP US); Y10S 501/906 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
US 8158204 B1 20120417; AT E224965 T1 20021015; AU 5060000 A 20001023; AU 757674 B2 20030227; CA 2367342 A1 20001012; CN 1268786 C 20060809; CN 1346412 A 20020424; DE 19916403 C1 20001012; DE 50000568 D1 20021031; DK 1169492 T3 20030203; EP 1169492 A2 20020109; EP 1169492 B1 20020925; ES 2183798 T3 20030401; HU 222653 B1 20030929; HU P0200790 A2 20020729; JP 2003530284 A 20031014; JP 2009084153 A 20090423; JP 4275319 B2 20090610; KR 20010113877 A 20011228; PL 193049 B1 20070131; PL 350799 A1 20030210; PT 1169492 E 20030228; RU 2250932 C2 20050427; WO 0060135 A2 20001012; WO 0060135 A3 20010419
DOCDB simple family (application)
US 95844300 A 20000406; AT 00934914 T 20000406; AU 5060000 A 20000406; CA 2367342 A 20000406; CN 00805960 A 20000406; DE 0001173 W 20000406; DE 19916403 A 19990406; DE 50000568 T 20000406; DK 00934914 T 20000406; EP 00934914 A 20000406; ES 00934914 T 20000406; HU P0200790 A 20000406; JP 2000609623 A 20000406; JP 2009000038 A 20090105; KR 20017012681 A 20011005; PL 35079900 A 20000406; PT 00934914 T 20000406; RU 2001130044 A 20000406