EP 1169492 B1 20020925 - METHOD OF PRODUCING THIN, POORLY SOLUBLE COATINGS
Title (en)
METHOD OF PRODUCING THIN, POORLY SOLUBLE COATINGS
Title (de)
VERFAHREN ZUR HERSTELLUNG DÜNNER, SCHWER LÖSLICHER BESCHICHTUNGEN
Title (fr)
PROCEDE DE REALISATION DE REVETEMENTS MINCES ET DIFFICILEMENT SOLUBLES
Publication
Application
Priority
- DE 0001173 W 20000406
- DE 19916403 A 19990406
Abstract (en)
[origin: DE19916403C1] Stable surface coatings can be produced by sputtering, evaporation coating, bath deposition or metal-organic chemical vapor deposition (MOCVD). With these methods it is not always possible to obtain homogeneous coatings which also reach internal surfaces. For the production of ceramic or oxidic layers (CL/OL) on substrates (S) the invention therefore provides that after application (I) and drying (II) of a suitable starting substance (P) the resulting starting-substance layer (PLD) is exposed (III) to a wet reactant gas (RG) to transform said layer into a corresponding hydroxide or complex layer (HL) and then heat treated (IV) for the formation of a ceramic or oxidic layer (CL/OL). For the alternative preparation of other chalcogenide layers presenting greater material conversion the layers are in addition exposed to a reactant gas containing a chalcogen hydrogen. Metallic layers can alternatively be produced using a reactant gas with reducing action. The methods provided for in the invention can be used in any application concerned with the protection and modification of surfaces, including shadow-cast structures, and the application of functional layers, notably in solar and materials technology.
IPC 1-7
IPC 8 full level
C01G 11/02 (2006.01); C23C 8/06 (2006.01); C23C 8/10 (2006.01); C01G 9/02 (2006.01); C23C 8/80 (2006.01); C23C 26/00 (2006.01); H01L 21/368 (2006.01); H01L 31/18 (2006.01)
CPC (source: EP KR US)
C23C 8/02 (2013.01 - KR); C23C 8/08 (2013.01 - KR); C23C 8/10 (2013.01 - EP US); C23C 8/80 (2013.01 - KR); C23C 26/00 (2013.01 - EP US); Y10S 501/906 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
US 8158204 B1 20120417; AT E224965 T1 20021015; AU 5060000 A 20001023; AU 757674 B2 20030227; CA 2367342 A1 20001012; CN 1268786 C 20060809; CN 1346412 A 20020424; DE 19916403 C1 20001012; DE 50000568 D1 20021031; DK 1169492 T3 20030203; EP 1169492 A2 20020109; EP 1169492 B1 20020925; ES 2183798 T3 20030401; HU 222653 B1 20030929; HU P0200790 A2 20020729; JP 2003530284 A 20031014; JP 2009084153 A 20090423; JP 4275319 B2 20090610; KR 20010113877 A 20011228; PL 193049 B1 20070131; PL 350799 A1 20030210; PT 1169492 E 20030228; RU 2250932 C2 20050427; WO 0060135 A2 20001012; WO 0060135 A3 20010419
DOCDB simple family (application)
US 95844300 A 20000406; AT 00934914 T 20000406; AU 5060000 A 20000406; CA 2367342 A 20000406; CN 00805960 A 20000406; DE 0001173 W 20000406; DE 19916403 A 19990406; DE 50000568 T 20000406; DK 00934914 T 20000406; EP 00934914 A 20000406; ES 00934914 T 20000406; HU P0200790 A 20000406; JP 2000609623 A 20000406; JP 2009000038 A 20090105; KR 20017012681 A 20011005; PL 35079900 A 20000406; PT 00934914 T 20000406; RU 2001130044 A 20000406