EP 1169732 A1 20020109 - METHOD AND DEVICE FOR TREATING THIN LAYERS OF AMORPHOUS SILICON
Title (en)
METHOD AND DEVICE FOR TREATING THIN LAYERS OF AMORPHOUS SILICON
Title (de)
VERFAHREN UND VORRICHTUNG ZUR BEHANDLUNG VON DÜNNSCHICHTEN AUS AMORPHEM SILIZIUM
Title (fr)
PROCEDE ET DISPOSITIF DE TRAITEMENT DE COUCHES MINCES DE SILICIUM AMORPHE
Publication
Application
Priority
- FR 0000854 W 20000405
- FR 9904468 A 19990409
Abstract (en)
[origin: FR2792112A1] The invention concerns the field of treatments, by energy intake, of thin deposited layers of hydrogenated amorphous silicon to modify a selected physico-chemical property of the layers. The invention is characterised in that it consists in illuminating the layers with a light source emitting a radiation of wavelength included in an optical absorption band of the amorphous silicon, and capable of delivering at least a treating pulse, lasting between 50 ns and 500 ns, thereby enabling the raise the electronic mobility ( mu ) of the thin layer by a factor ranging between 1.5 and 10.
IPC 1-7
IPC 8 full level
G02F 1/1368 (2006.01); G02F 1/136 (2006.01); G09F 9/00 (2006.01); G09F 9/30 (2006.01); G09F 9/35 (2006.01); H01L 21/20 (2006.01); H01L 21/268 (2006.01); H01L 21/322 (2006.01); H01L 21/336 (2006.01); H01L 29/423 (2006.01); H01L 29/43 (2006.01); H01L 29/49 (2006.01); H01L 29/786 (2006.01)
CPC (source: EP KR)
G02F 1/136 (2013.01 - EP); G02F 1/1368 (2013.01 - EP); G09F 9/00 (2013.01 - EP); G09F 9/30 (2013.01 - EP); G09F 9/35 (2013.01 - EP); H01L 21/02532 (2013.01 - EP); H01L 21/02686 (2013.01 - EP); H01L 21/268 (2013.01 - EP KR); H01L 21/322 (2013.01 - EP); H01L 29/423 (2013.01 - EP); H01L 29/43 (2013.01 - EP); H01L 29/49 (2013.01 - EP); H01L 29/66765 (2013.01 - EP); H01L 29/786 (2013.01 - EP)
Citation (search report)
See references of WO 0062336A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
FR 2792112 A1 20001013; FR 2792112 B1 20020809; AU 3824100 A 20001114; EP 1169732 A1 20020109; JP 2002541679 A 20021203; KR 20010112417 A 20011220; WO 0062336 A1 20001019
DOCDB simple family (application)
FR 9904468 A 19990409; AU 3824100 A 20000405; EP 00917124 A 20000405; FR 0000854 W 20000405; JP 2000611312 A 20000405; KR 20017012898 A 20011009