Global Patent Index - EP 1169732 A1

EP 1169732 A1 20020109 - METHOD AND DEVICE FOR TREATING THIN LAYERS OF AMORPHOUS SILICON

Title (en)

METHOD AND DEVICE FOR TREATING THIN LAYERS OF AMORPHOUS SILICON

Title (de)

VERFAHREN UND VORRICHTUNG ZUR BEHANDLUNG VON DÜNNSCHICHTEN AUS AMORPHEM SILIZIUM

Title (fr)

PROCEDE ET DISPOSITIF DE TRAITEMENT DE COUCHES MINCES DE SILICIUM AMORPHE

Publication

EP 1169732 A1 20020109 (FR)

Application

EP 00917124 A 20000405

Priority

  • FR 0000854 W 20000405
  • FR 9904468 A 19990409

Abstract (en)

[origin: FR2792112A1] The invention concerns the field of treatments, by energy intake, of thin deposited layers of hydrogenated amorphous silicon to modify a selected physico-chemical property of the layers. The invention is characterised in that it consists in illuminating the layers with a light source emitting a radiation of wavelength included in an optical absorption band of the amorphous silicon, and capable of delivering at least a treating pulse, lasting between 50 ns and 500 ns, thereby enabling the raise the electronic mobility ( mu ) of the thin layer by a factor ranging between 1.5 and 10.

IPC 1-7

H01L 21/336; H01L 21/20; H01L 21/268

IPC 8 full level

G02F 1/1368 (2006.01); G02F 1/136 (2006.01); G09F 9/00 (2006.01); G09F 9/30 (2006.01); G09F 9/35 (2006.01); H01L 21/20 (2006.01); H01L 21/268 (2006.01); H01L 21/322 (2006.01); H01L 21/336 (2006.01); H01L 29/423 (2006.01); H01L 29/43 (2006.01); H01L 29/49 (2006.01); H01L 29/786 (2006.01)

CPC (source: EP)

G02F 1/136 (2013.01); G02F 1/1368 (2013.01); G09F 9/00 (2013.01); G09F 9/30 (2013.01); G09F 9/35 (2013.01); H01L 21/02532 (2013.01); H01L 21/02686 (2013.01); H01L 21/268 (2013.01); H01L 21/322 (2013.01); H01L 29/423 (2013.01); H01L 29/43 (2013.01); H01L 29/49 (2013.01); H01L 29/66765 (2013.01); H01L 29/786 (2013.01)

Citation (search report)

See references of WO 0062336A1

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

DOCDB simple family (publication)

FR 2792112 A1 20001013; FR 2792112 B1 20020809; AU 3824100 A 20001114; EP 1169732 A1 20020109; JP 2002541679 A 20021203; KR 20010112417 A 20011220; WO 0062336 A1 20001019

DOCDB simple family (application)

FR 9904468 A 19990409; AU 3824100 A 20000405; EP 00917124 A 20000405; FR 0000854 W 20000405; JP 2000611312 A 20000405; KR 20017012898 A 20011009