EP 1170783 A1 20020109 - Pick-up-tool
Title (en)
Pick-up-tool
Title (de)
Greifwerkzeug
Title (fr)
Pipette à vide
Publication
Application
Priority
- EP 01810573 A 20010614
- EP 00810578 A 20000703
Abstract (en)
A pick-up tool for the mounting of semiconductor chips onto a substrate has a suction device which consists of a plate (4) made out of a dimensionally stable material one surface of which (5) has structures (6) made of hardened adhesive. The material for the plate (4) is, for example, aluminium, a carbon fibre composite material or a dimensionally stable plastic. A suitable material for the structures (6) is, for example, an adhesive which has Teflon TM as the filling material. <IMAGE>
IPC 1-7
IPC 8 full level
H01L 21/683 (2006.01)
CPC (source: EP)
H01L 21/6838 (2013.01)
Citation (search report)
- [A] EP 0456426 A1 19911113 - CANON KK [JP]
- [A] EP 0298564 A1 19890111 - PHILIPS & DU PONT OPTICAL [NL]
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
DOCDB simple family (application)
EP 01810573 A 20010614