Global Patent Index - EP 1173881 A1

EP 1173881 A1 20020123 - INTEGRATED HEATING AND COOLING DEVICE IN A REACTOR FOR THERMAL TREATMENT OF A SUBSTRATE

Title (en)

INTEGRATED HEATING AND COOLING DEVICE IN A REACTOR FOR THERMAL TREATMENT OF A SUBSTRATE

Title (de)

HEIZ- UND KÜHLVORRICHTUNG EINGEBAUT IN EINEN REAKTOR ZUR WÄRMEBEHANDLUNG EINES SUBSTRATES

Title (fr)

DISPOSITIF DE CHAUFFAGE ET DE REFROIDISSEMENT INTEGRE DANS UN REACTEUR DE TRAITEMENT THERMIQUE D'UN SUBSTRAT

Publication

EP 1173881 A1 20020123 (FR)

Application

EP 00918959 A 20000412

Priority

  • FR 0000946 W 20000412
  • FR 9904680 A 19990412

Abstract (en)

[origin: FR2792084A1] A heating and cooling device for a substrate (14), comprising an electric heating resistor(16) which is integrated into notches (18) in the plate (12) with an inner covering (22) exhibiting good thermal conductivity placed therebetween. A cooling box (26) is arranged opposite the plate (12) and can be displaced between a first position that is spaced by means of a gap (32) in the lower surface of the plate (12) during the heating phase when the resistor (16) is supplied with power and a second near position when it comes into contact with the lower surface during cooling of the plate (12). The cooling box (26) is provided with a superficial sheet (30) of compressible material exhibiting good thermal conductivity to ensure homogeneous thermal contact with the lower surface of the plate (12). The notches(18) of the plate (12) are separated from each other by intermediate transverse members (20) that are used as calorific transfer means when the cooling box (26) is in the second near position. The invention can be used in thermal treatments of substrates or samples.

IPC 1-7

H01L 21/00; C23C 14/54

IPC 8 full level

H05B 3/68 (2006.01); F27D 9/00 (2006.01); F27D 11/00 (2006.01); F27D 11/02 (2006.01); H01L 21/00 (2006.01); H01L 21/26 (2006.01)

CPC (source: EP)

H01L 21/67109 (2013.01)

Citation (search report)

See references of WO 0062333A1

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

DOCDB simple family (publication)

FR 2792084 A1 20001013; EP 1173881 A1 20020123; JP 2002541428 A 20021203; KR 20010110737 A 20011213; WO 0062333 A1 20001019

DOCDB simple family (application)

FR 9904680 A 19990412; EP 00918959 A 20000412; FR 0000946 W 20000412; JP 2000611309 A 20000412; KR 20017012943 A 20011011