EP 1177858 A1 20020206 - Fixed-abrasive belt polisher
Title (en)
Fixed-abrasive belt polisher
Title (de)
Bandpoliergerät mit fixiertem Schleifmittel
Title (fr)
Polissoir a bande de abrasiv fixé
Publication
Application
Priority
EP 00306584 A 20000802
Abstract (en)
A chemical mechanical polishing apparatus (30) includes a substrate holder (40) to hold a substrate (50), a continuous polishing belt (60), and a backing member (66). The polishing belt includes a first layer formed of a fixed-abrasive polishing material (22) and having a first side, and a second layer formed of a flexible membrane material (20) and having a second side. The belt is configured so that in use the first side of the belt contacts at least a portion of the substrate held by the substrate holder while the membrane is moving in a first direction in a generally linear path relative to the substrate. The backing member (66) is positioned on the second side of the membrane. <IMAGE>
IPC 1-7
IPC 8 full level
B24B 21/10 (2006.01); B24B 37/24 (2012.01); B24D 3/28 (2006.01)
CPC (source: EP)
B24B 21/10 (2013.01); B24B 37/245 (2013.01); B24D 3/28 (2013.01)
Citation (search report)
- [Y] WO 9720660 A1 19970612 - APPLIED MATERIALS INC [US]
- [Y] WO 9849723 A1 19981105 - MINNESOTA MINING & MFG [US], et al
- [A] WO 9845090 A1 19981015 - OBSIDIAN INC [US], et al
- [A] WO 9906182 A1 19990211 - SCAPA GROUP PLC [GB], et al
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
DOCDB simple family (application)
EP 00306584 A 20000802