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EP 1178357 A1 20020206 - Lithographic apparatus

Title (en)

Lithographic apparatus

Title (de)

Lithographischer Apparat

Title (fr)

Appareil lithographique

Publication

EP 1178357 A1 20020206 (EN)

Application

EP 01306641 A 20010802

Priority

EP 01306641 A 20010802
EP 00306684 A 20000803

Abstract (en)

A lithographic projection apparatus including at least one temperature control member VC, TE, TB that at least partly surrounds at least one component selected from a group comprising mask and substrate tables MT, WT, the projection system PL and an isolated reference frame MF for controlling the temperature of the surrounded components. The surface finish of the member is chosen to help keep the components which it partly surrounds isothermal during operation. <IMAGE>

IPC 1-7

G03F 7/20

IPC 8 full level

G03F 7/20 (2006.01)

CPC (source: EP)

G03F 7/708 (2013.01)

Citation (search report)

[X] EP 0532968 A1 19930324 - HITACHI LTD [JP]
[X] US 4916322 A 19900410 - GLAVISH HILTON F [US], et al
[X] EP 0844532 A2 19980527 - NIPPON KOGAKU KK [JP]

Designated contracting state (EPC)

DE FR GB IT NL

DOCDB simple family (publication)

EP 1178357 A1 20020206

DOCDB simple family (application)

EP 01306641 A 20010802