EP 1181765 A1 20020227 - ROTARY ELECTROSTATIC MICROACTUATOR
Title (en)
ROTARY ELECTROSTATIC MICROACTUATOR
Title (de)
ROTIERENDER ELEKTROSTATISCHER BETÄTIGER
Title (fr)
MICROACTIONNEUR ELECTROSTATIQUE ROTATIF
Publication
Application
Priority
- US 9929964 W 19991215
- US 11226398 P 19981215
- US 11226598 P 19981215
- US 12351299 P 19990308
Abstract (en)
[origin: WO0036740A1] A rotary electrostatic microactuator (101) that includes a substantially planar substrate (102) and a rotatable member (103) overlying the substrate for rotation about an axis of rotation (108) extending perpendicular to the planar substrate. First and second spaced-apart springs (113, 114) and a plurality of comb drive assemblies (106, 107) are included. Each of the comb drive assemblies has a first comb drive member (111) mounted on the substrate and a second comb drive member (112). Each of the first and second comb drive members are provided with arcuate comb drive fingers (123, 127). Each of the first and second springs has a first end portion (131a) secured to the substrate and a second end portion (132b) secured to at least one of the second comb drive members for suspending the second comb drive members and the rotatable member over the substrate. The second comb drive members are movable in a direction of travel about the axis of rotation between a first position in which the comb drive fingers of the first and second comb drive members are not substantially fully interdigitated and a second position in which the comb drive fingers of the first and second comb drive members are substantially fully interdigitated.
IPC 1-7
IPC 8 full level
G02B 26/08 (2006.01); B81B 5/00 (2006.01); G02B 6/35 (2006.01); H02N 1/00 (2006.01); G11B 7/085 (2006.01); G11B 11/105 (2006.01)
CPC (source: EP)
H02N 1/008 (2013.01); G02B 6/3512 (2013.01); G02B 6/357 (2013.01); G11B 7/08564 (2013.01); G11B 11/10563 (2013.01)
Citation (search report)
See references of WO 0036740A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 0036740 A1 20000622; AU 2365500 A 20000703; CA 2354604 A1 20000622; CA 2356905 A1 20000622; CN 1333943 A 20020130; EP 1181765 A1 20020227; JP 2002542747 A 20021210
DOCDB simple family (application)
US 9929964 W 19991215; AU 2365500 A 19991215; CA 2354604 A 19991215; CA 2356905 A 19991215; CN 99815672 A 19991215; EP 99967365 A 19991215; JP 2000588889 A 19991215