EP 1188225 A4 20051102 - ELECTROSTATIC MICROACTUATOR WITH OFFSET AND/OR INCLINED COMB DRIVE FINGERS
Title (en)
ELECTROSTATIC MICROACTUATOR WITH OFFSET AND/OR INCLINED COMB DRIVE FINGERS
Title (de)
Elektrostatischer kammförmiger Mikroantrieb mit versetzten und/ oder schrägen Fingern
Title (fr)
NICRO-ACTIONNEUR ELECTROSTATIQUE AVEC DOIGTS DE COMMANDE DECALES ET/OU INCLINES
Publication
Application
Priority
- US 0009919 W 20000412
- US 12876499 P 19990412
- US 46436199 A 19991215
Abstract (en)
[origin: WO0062410A1] An electrostatic microactuator (23) comprising a substrate (27) having a first comb drive member (61) mounted on the substrate and a second comb drive member (62) overlying the substrate. At least one spring member (83) having a first end portion (83a) secured to the substrate and a second end portion (83b) secured to the second comb drive member. The second comb drive has a plurality of second comb drive fingers (72) extending from a side of a second elongated member (71) and is movable between a first position in which each second comb drive finger is not substantially interdigitated with an adjacent pair of a plurality of first comb drive fingers extending from a side of a first elongated member of the first comb drive member, and a second position in which each of such second comb drive finger is substantially fully interdigitated with such adjacent pair of first comb drive fingers.
IPC 1-7
IPC 8 full level
CPC (source: EP)
G02B 6/357 (2013.01); H02N 1/008 (2013.01); G02B 6/3512 (2013.01); G02B 6/3548 (2013.01); G02B 6/3582 (2013.01)
Citation (search report)
- No further relevant documents disclosed
- See references of WO 0062410A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 0062410 A1 20001019; AU 4346000 A 20001114; CA 2370044 A1 20001019; EP 1188225 A1 20020320; EP 1188225 A4 20051102
DOCDB simple family (application)
US 0009919 W 20000412; AU 4346000 A 20000412; CA 2370044 A 20000412; EP 00923312 A 20000412