Global Patent Index - EP 1189275 A8

EP 1189275 A8 2002-09-11 - SUBSTRATE TRANSFER DEVICE

Title (en)

SUBSTRATE TRANSFER DEVICE

Title (de)

SUBSTRAT-TRANSPORTANORDNUNG

Title (fr)

DISPOSITIF DE TRANSFERT DE SUBSTRATS

Publication

EP 1189275 A8 (EN)

Application

EP 01915813 A

Priority

  • JP 0102450 W
  • JP 2000091444 A

Abstract (en)

[origin: EP1189275A1] In this substrate transport apparatus, portions connecting a transport chamber (101) with a first load-lock chamber (109) and a second load-lock chamber (110) are provided to linearly align with each other. A processing station (120,121) for processing a substrate (400) is provided on a position not interfering with rotational motion and telescopic motion of a robot arm (106). A substrate transport apparatus capable of improving the degree of integration of the apparatus while suppressing enlargement of a foot print and implementing common load-lock chambers can be provided by employing this structure. <IMAGE>

IPC 1-7 (main, further and additional classification)

H01L 21/68

IPC 8 full level (invention and additional information)

B65G 49/07 (2006.01); H01L 21/00 (2006.01); H01L 21/677 (2006.01); H01L 21/68 (2006.01)

CPC (invention and additional information)

H01L 21/67745 (2013.01); H01L 21/67167 (2013.01); H01L 21/67201 (2013.01); H01L 21/6835 (2013.01)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

EPO simple patent family

EP 1189275 A1 20020320; EP 1189275 A8 20020911; CN 1365519 A 20020821; US 2002157691 A1 20021031; WO 0173840 A1 20011004

INPADOC legal status


2003-01-15 [18W] APPLICATION WITHDRAWN

- Date of withdrawal: 20021113

2002-03-20 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20011130

2002-03-20 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR