EP 1192459 A1 20020403 - SEMICONDUCTOR GAS SENSOR WITH HOUSING AND METHOD FOR MEASURING OF GAS CONCENTRATIONS
Title (en)
SEMICONDUCTOR GAS SENSOR WITH HOUSING AND METHOD FOR MEASURING OF GAS CONCENTRATIONS
Title (de)
HALBLEITER-GASSENSOR MIT GEHÄUSE UND VERFAHREN ZUR MESSUNG VON GASKONZENTRATIONEN
Title (fr)
CAPTEUR DE GAZ A SEMI-CONDUCTEUR POURVU D'UN BOITIER, ET PROCEDE DE MESURE DE CONCENTRATIONS DE GAZ
Publication
Application
Priority
- DE 0001105 W 20000411
- DE 19916797 A 19990414
Abstract (en)
[origin: WO0062056A1] The invention relates to a semiconductor gas sensor, for example for measuring CO, NOx, O3, etc., which comprises a heatable sensor element (1) for measuring gas concentrations, as well as a housing (2) in whose interior (20) the sensor element (1) is positioned. The housing (2) has a first opening (3) which connects the interior (20) with the exterior. The housing (2) also presents one or more second openings (4a, 4b) which are situated lower than the first opening (3) such that a gas stream is driven by convection from the second opening (4a, 4b) to the first opening (3). The semiconductor gas sensor can be made of silicon using microtechnology methods.
IPC 1-7
IPC 8 full level
G01N 1/22 (2006.01); G01N 27/12 (2006.01); G01N 33/00 (2006.01)
CPC (source: EP KR US)
C01G 19/02 (2013.01 - KR); G01N 27/12 (2013.01 - EP US); G01N 27/125 (2013.01 - KR); G01N 33/0009 (2013.01 - EP KR US); G01N 33/0037 (2013.01 - KR); G01N 33/0039 (2013.01 - KR); G01N 33/004 (2013.01 - KR); H01L 21/02535 (2013.01 - KR)
Citation (search report)
See references of WO 0062056A1
Designated contracting state (EPC)
DE ES FR GB IT SE
DOCDB simple family (publication)
WO 0062056 A1 20001019; CN 1347498 A 20020501; DE 19916797 A1 20001123; DE 19916797 C2 20010816; EP 1192459 A1 20020403; JP 2002541477 A 20021203; KR 20020011379 A 20020208; US 6736001 B1 20040518
DOCDB simple family (application)
DE 0001105 W 20000411; CN 00806254 A 20000411; DE 19916797 A 19990414; EP 00938476 A 20000411; JP 2000611069 A 20000411; KR 20017012942 A 20011011; US 95895702 A 20020116