EP 1194610 A1 20020410 - METHOD AND SYSTEM FOR PUMPING SEMICONDUCTOR EQUIPMENT FROM TRANSFER CHAMBERS
Title (en)
METHOD AND SYSTEM FOR PUMPING SEMICONDUCTOR EQUIPMENT FROM TRANSFER CHAMBERS
Title (de)
VERFAHREN UND PUMPENSYSTEM FÜR LADUNGSSCHLEUSENKAMMERN EINER HALBLEITERVORRICHTUNG
Title (fr)
PROCEDE ET SYSTEME DE POMPAGE DES CHAMBRES DE TRANSFERT D'EQUIPEMENT DE SEMI-CONDUCTEUR
Publication
Application
Priority
- FR 0101219 W 20010420
- FR 0005096 A 20000420
Abstract (en)
[origin: WO0181651A1] The invention concerns a method which consists in pumping the gases present in a transfer chamber (1) using a primary pump (3) driven by variable speed driving means, mounted in series with a turbomolecular secondary pump (6), and associated with gas controlling means (8, 10, 13, 16) to control one or several appropriate characteristic parameters of the pumped gases and to produce control signals acting on the means driving the primary pump (3) to adapt its pumping speed so as to avoid any condensation or solidification in the airlock or transfer chamber (1). Thus the pressure drop speed can be optimised thereby reducing pollution introduced into the process chamber (2).
IPC 1-7
IPC 8 full level
B65G 49/00 (2006.01); C23C 14/56 (2006.01); C23C 16/44 (2006.01); H01L 21/00 (2006.01); H01L 21/205 (2006.01); H01L 21/677 (2006.01)
CPC (source: EP US)
C23C 14/564 (2013.01 - EP US); C23C 14/566 (2013.01 - EP US); C23C 16/4412 (2013.01 - EP US); H01L 21/67017 (2013.01 - EP US)
Citation (search report)
See references of WO 0181651A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 0181651 A1 20011101; EP 1194610 A1 20020410; FR 2807951 A1 20011026; FR 2807951 B1 20030516; JP 2003531503 A 20031021; US 6402479 B1 20020611
DOCDB simple family (application)
FR 0101219 W 20010420; EP 01928018 A 20010420; FR 0005096 A 20000420; JP 2001578718 A 20010420; US 61459300 A 20000712