EP 1200198 B1 20030122 - ACTUATOR COMPONENT FOR A MICROSPRAY AND ITS PRODUCTION PROCESS
Title (en)
ACTUATOR COMPONENT FOR A MICROSPRAY AND ITS PRODUCTION PROCESS
Title (de)
AKTORBAUGLIED FÜR EINEN MIKROZERSTÄUBER UND VERFAHREN ZU SEINER HERSTELLUNG
Title (fr)
ELEMENT D'ACTIONNEUR DESTINE A UN MICRODIFFUSEUR ET SON PROCEDE DE REALISATION
Publication
Application
Priority
- DE 19938055 A 19990812
- EP 0007798 W 20000810
Abstract (en)
[origin: WO0112340A1] An actuator component for a piezoelectric microspray comprising a membrane (12) formed in a semiconductor chip (10), a piezoelectric actuator fitted on the surface of the membrane (12), which sets the membrane vibrating, and a tube (14) attached to the semiconductor chip which conducts the liquid to be atomized from an inlet port to the piezoelectric actuator on the opposite surface of the membrane. A microspray using this sort of actuator component is comprises a holding device to which this sort of actuator component is fixed, so that the inlet is directly connected to the fluid by means of a liquid-conducting tube; exceptionally, the pipe is connected to the liquid duct and piezoelectric actuator beside surface of the membrane by means of the holding device. Said holding device has an opening around the surface zone of the membrane opposite the actuator for the discharge of atomized liquid.
IPC 1-7
IPC 8 full level
B81B 3/00 (2006.01); B05B 17/06 (2006.01); B06B 1/06 (2006.01); H10N 30/01 (2023.01); H10N 30/20 (2023.01); H10N 30/853 (2023.01)
CPC (source: EP US)
B05B 17/0607 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 0112340 A1 20010222; DE 19938055 A1 20010315; DE 50001149 D1 20030227; EP 1200198 A1 20020502; EP 1200198 B1 20030122; JP 2003507168 A 20030225; JP 3598095 B2 20041208; US 6536682 B1 20030325
DOCDB simple family (application)
EP 0007798 W 20000810; DE 19938055 A 19990812; DE 50001149 T 20000810; EP 00949481 A 20000810; JP 2001516676 A 20000810; US 4919502 A 20020617