EP 1201367 A1 20020502 - Dresser for polishing cloth and manufacturing method therefor
Title (en)
Dresser for polishing cloth and manufacturing method therefor
Title (de)
Vorrichtung zum Abrichten eines Polierkissens und Verfahren zum Herstellen des Polierkissens
Title (fr)
Appareil ébarbeur pour tampon de polissage et son procédé de fabrication
Publication
Application
Priority
JP 2000327146 A 20001026
Abstract (en)
A dresser for a chemical and mechanical polishing cloth is provided in which a sintered product constituting the dressing face 2a is obtained by mixing a bonding material 4 consisting of silicon and/or silicon alloy with diamond grit 3, and forming and sintering the mixture. A carbide film 5 generated by sintering silicon in the bonding material into diamond is formed on the surface of the diamond grit 3. Thereby, the diamond grit is firmly bonded with the bonding material, and the bonding material is not dissolved. Preferably, the particles of the diamond grit are arranged on the surface of the bonding member with two-dimensional regularity, the distance between adjacent grits on the smallest lattice formed by the arrangement is within a range between 10 mu m to 3,000 mu m. Thus a uniform dressing surface can be created. <IMAGE>
IPC 1-7
IPC 8 full level
B24B 53/017 (2012.01); B24B 53/12 (2006.01); B24D 3/00 (2006.01); B24D 3/06 (2006.01); B24D 3/14 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP)
B24B 53/12 (2013.01); B24D 3/14 (2013.01)
Citation (search report)
- [XY] US 4793828 A 19881227 - BURNAND RICHARD P [ZA]
- [Y] GB 2044146 A 19801015 - HENDERSON DIAMOND TOOL CO LTD
- [A] WO 9908837 A1 19990225 - STRUERS AS [DK], et al
- [DA] PATENT ABSTRACTS OF JAPAN vol. 2000, no. 08 6 October 2000 (2000-10-06)
- [DA] PATENT ABSTRACTS OF JAPAN vol. 1998, no. 05 30 April 1998 (1998-04-30)
Designated contracting state (EPC)
DE FR GB NL
DOCDB simple family (publication)
EP 1201367 A1 20020502; EP 1201367 B1 20070801; DE 60129650 D1 20070913; DE 60129650 T2 20080521; JP 2002127017 A 20020508; JP 3759399 B2 20060322
DOCDB simple family (application)
EP 01305243 A 20010615; DE 60129650 T 20010615; JP 2000327146 A 20001026