Global Patent Index - EP 1203265 A1

EP 1203265 A1 20020508 - LITHOGRAPHY USING QUANTUM ENTANGLED PARTICLES

Title (en)

LITHOGRAPHY USING QUANTUM ENTANGLED PARTICLES

Title (de)

INTERFERENZLITHOGRAPHIE MITTELS QUANTENMECHANISCH VERSCHRÄNKTER PARTIKEL

Title (fr)

LITHOGRAPHIE UTILISANT DES PARTICULES QUANTIQUES ENTREMELEES

Publication

EP 1203265 A1 20020508 (EN)

Application

EP 00961318 A 20000519

Priority

  • US 0013931 W 20000519
  • US 13531699 P 19990520
  • US 39320099 A 19990910
  • US 39345199 A 19990910

Abstract (en)

[origin: WO0075730A1] A system of etching using quantum entangled particles to get shorter interference fringes. An interferometer (100) is used to obtain an interference fringe. N entangled photons are input to the interferometer (100). This reduces the distance between interference fringes by n, where again n is the number of entangled photons.

IPC 1-7

G03F 7/20; G03F 9/00

IPC 8 full level

G03F 7/20 (2006.01); G03F 7/00 (2006.01)

CPC (source: EP)

G03F 7/001 (2013.01); G03F 7/2051 (2013.01); G03F 7/70375 (2013.01); G03F 7/70408 (2013.01)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

DOCDB simple family (publication)

WO 0075730 A1 20001214; AU 7328800 A 20001228; EP 1203265 A1 20020508; EP 1203265 A4 20060802

DOCDB simple family (application)

US 0013931 W 20000519; AU 7328800 A 20000519; EP 00961318 A 20000519