Global Patent Index - EP 1203265 A4

EP 1203265 A4 20060802 - LITHOGRAPHY USING QUANTUM ENTANGLED PARTICLES

Title (en)

LITHOGRAPHY USING QUANTUM ENTANGLED PARTICLES

Title (de)

INTERFERENZLITHOGRAPHIE MITTELS QUANTENMECHANISCH VERSCHRÄNKTER PARTIKEL

Title (fr)

LITHOGRAPHIE UTILISANT DES PARTICULES DE QUANTA ENTREMELEES

Publication

EP 1203265 A4 20060802 (EN)

Application

EP 00961318 A 20000519

Priority

  • US 0013931 W 20000519
  • US 13531699 P 19990520
  • US 39320099 A 19990910
  • US 39345199 A 19990910

Abstract (en)

[origin: WO0075730A1] A system of etching using quantum entangled particles to get shorter interference fringes. An interferometer (100) is used to obtain an interference fringe. N entangled photons are input to the interferometer (100). This reduces the distance between interference fringes by n, where again n is the number of entangled photons.

IPC 1-7

G03F 7/20

IPC 8 full level

G03F 7/00 (2006.01); G03F 7/20 (2006.01)

CPC (source: EP)

G03F 7/001 (2013.01); G03F 7/2051 (2013.01); G03F 7/70375 (2013.01); G03F 7/70408 (2013.01)

Citation (search report)

  • [X] US 5796477 A 19980818 - TEICH MALVIN CARL [US], et al
  • [Y] US 5759744 A 19980602 - BRUECK STEVEN R J [US], et al
  • [XY] FONSECA E J S ET AL: "Measurement of the de Broglie wavelength of a multiphoton wave packet", PHYSICAL REVIEW LETTERS APS USA, vol. 82, no. 14, 5 April 1999 (1999-04-05), pages 2868 - 2871, XP002385405, ISSN: 0031-9007
  • [XY] DOWLING J P: "Correlated input-port, matter-wave interferometer: Quantum-noise limits to the atom-laser gyroscope", PHYSICAL REVIEW A (ATOMIC, MOLECULAR, AND OPTICAL PHYSICS) APS THROUGH AIP USA, vol. 57, no. 6, June 1998 (1998-06-01), pages 4736 - 4746, XP002385406, ISSN: 1050-2947
  • [XY] JACOBSON J ET AL: "Photonic de Broglie waves", PHYSICAL REVIEW LETTERS USA, vol. 74, no. 24, 12 June 1995 (1995-06-12), pages 4835 - 4838, XP002385407, ISSN: 0031-9007
  • [X] OGAWA T ET AL: "Sub-quarter micron optical lithography with practical super resolution technique", PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING USA, vol. 2440, 1995, pages 772 - 783, XP002386016, ISSN: 0277-786X
  • See references of WO 0075730A1

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

DOCDB simple family (publication)

WO 0075730 A1 20001214; AU 7328800 A 20001228; EP 1203265 A1 20020508; EP 1203265 A4 20060802

DOCDB simple family (application)

US 0013931 W 20000519; AU 7328800 A 20000519; EP 00961318 A 20000519