EP 1203398 A1 20020508 - SUBSTRATE AND WORKPIECE SUPPORT FOR RECEIVING A SUBSTRATE
Title (en)
SUBSTRATE AND WORKPIECE SUPPORT FOR RECEIVING A SUBSTRATE
Title (de)
SUBSTRAT UND WERKSTÜCKTRÄGER ZUR AUFNAHME DES SUBSTRATES
Title (fr)
SUBSTRAT ET PORTE-PIECE DESTINE A RECEVOIR LE SUBSTRAT
Publication
Application
Priority
- DE 0002368 W 20000719
- DE 19934114 A 19990721
Abstract (en)
[origin: DE19934114A1] Substrate carrier comprises a base element (28) for receiving the substrate (12) arranged on a handling element (30) having covering elements (50). Preferred Features: The base element has individual carrier elements and the substrate has a bearing surface for the carrier elements.
IPC 1-7
IPC 8 full level
H01L 21/683 (2006.01); C23C 14/50 (2006.01); G01L 9/00 (2006.01); H01L 21/68 (2006.01)
CPC (source: EP)
C23C 14/50 (2013.01); G01L 9/0051 (2013.01); H01L 21/6835 (2013.01)
Citation (search report)
See references of WO 0108199A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
DE 19934114 A1 20010125; EP 1203398 A1 20020508; JP 2003505880 A 20030212; WO 0108199 A1 20010201
DOCDB simple family (application)
DE 19934114 A 19990721; DE 0002368 W 20000719; EP 00954347 A 20000719; JP 2001512619 A 20000719