EP 1203403 A1 20020508 - METHOD FOR TRANSFERRING A THIN LAYER COMPRISING A STEP OF EXCESS FRAGILIZATION
Title (en)
METHOD FOR TRANSFERRING A THIN LAYER COMPRISING A STEP OF EXCESS FRAGILIZATION
Title (de)
VERFAHREN ZUR ÜBERTRAGUNG EINER DÜNNEN SCHICHT UNTER VERWENDUNG EINES VERSPRÖDUNGSSCHRITTES
Title (fr)
PROCEDE DE TRANSFERT D'UNE COUCHE MINCE COMPORTANT UNE ETAPE DE SURFRAGILISATION
Publication
Application
Priority
- FR 0002239 W 20000803
- FR 9910121 A 19990804
Abstract (en)
[origin: FR2797347A1] The invention concerns a method for transferring a thin layer (18) from a source substrate (10) to a target support (30) comprising the following steps: a) implanting ions or gaseous species into the source substrate so as to form therein a zone (16) called cleavage zone, delimiting said thin layer (18) in the source substrate; b) transferring the substrate source onto the target support and making the thin layer integral with the target source; c) separating the thin layer (18) from the source substrate (10) along the cleavage zone. The invention is characterised in that the method comprises, prior to step b): a process for excess fragilization of the cleavage zone (16) produced by a heat treatment and/or by exerting mechanical stresses on the source substrate.
IPC 1-7
IPC 8 full level
H01L 21/265 (2006.01); H01L 21/02 (2006.01); H01L 21/762 (2006.01); H01L 27/12 (2006.01)
CPC (source: EP KR)
H01L 21/76254 (2013.01 - EP KR); H01L 21/324 (2013.01 - KR)
Citation (search report)
See references of WO 0111667A1
Designated contracting state (EPC)
FR GB IT NL
DOCDB simple family (publication)
FR 2797347 A1 20010209; FR 2797347 B1 20011123; EP 1203403 A1 20020508; JP 2003506892 A 20030218; KR 100742240 B1 20070724; KR 20020085868 A 20021116; MY 137329 A 20090130; TW 457565 B 20011001; WO 0111667 A1 20010215
DOCDB simple family (application)
FR 9910121 A 19990804; EP 00956612 A 20000803; FR 0002239 W 20000803; JP 2001516228 A 20000803; KR 20027001366 A 20020131; MY PI20003580 A 20000804; TW 89115613 A 20000905