Global Patent Index - EP 1204786 A1

EP 1204786 A1 20020515 - ARRANGEMENT ENABLING A LIQUID TO FLOW EVENLY AROUND A SURFACE OF A SAMPLE AND USE OF SAID ARRANGEMENT

Title (en)

ARRANGEMENT ENABLING A LIQUID TO FLOW EVENLY AROUND A SURFACE OF A SAMPLE AND USE OF SAID ARRANGEMENT

Title (de)

ANORDNUNG ZUM GLEICHMÄSSIGEN UMSTRÖMEN EINER OBERFLÄCHE EINER EINER PROBE MIT FLÜSSIGKEIT UND VERWENDUNG DER ANORDNUNG

Title (fr)

DISPOSITIF PERMETTANT A UN LIQUIDE DE S'ECOULER UNIFORMEMENT SUR LA SURFACE D'UN ECHANTILLON ET UTILISATION DE CE DISPOSITIF

Publication

EP 1204786 A1 20020515 (DE)

Application

EP 00963895 A 20000810

Priority

  • DE 0002704 W 20000810
  • DE 19938409 A 19990813

Abstract (en)

[origin: WO0112882A1] The invention relates to an arrangement enabling a liquid (2) to flow evenly around a surface of a sample (3). Said arrangement has a flow chamber (1) through which a liquid (2) flows via inlet and outlet pipes (7, 8). The sample (3) can be rotated about an axis of rotation by means of a rotary drive (5). A filter (13) which extends crosswise to the direction of flow of the liquid (2) and which ensures that said liquid flows evenly through the inlet and outlet pipes (7, 8) is situated in front of said inlet and outlet pipes (7, 8). The inventive arrangement is especially suitable for precipitating a homogenous layer of a nickel/iron alloy on a silicon wafer (3). The invention also relates to the use of the inventive arrangement.

IPC 1-7

C25D 5/08; C25D 7/12; H01L 21/28

IPC 8 full level

C25D 5/08 (2006.01); C25D 7/12 (2006.01); H01L 21/28 (2006.01)

CPC (source: EP US)

C25D 5/08 (2013.01 - EP US); C25D 17/001 (2013.01 - EP US)

Citation (search report)

See references of WO 0112882A1

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

DOCDB simple family (publication)

WO 0112882 A1 20010222; DE 19938409 C1 20010322; DE 50001464 D1 20030417; EP 1204786 A1 20020515; EP 1204786 B1 20030312; US 6949172 B1 20050927

DOCDB simple family (application)

DE 0002704 W 20000810; DE 19938409 A 19990813; DE 50001464 T 20000810; EP 00963895 A 20000810; US 6917702 A 20020702