EP 1204786 A1 20020515 - ARRANGEMENT ENABLING A LIQUID TO FLOW EVENLY AROUND A SURFACE OF A SAMPLE AND USE OF SAID ARRANGEMENT
Title (en)
ARRANGEMENT ENABLING A LIQUID TO FLOW EVENLY AROUND A SURFACE OF A SAMPLE AND USE OF SAID ARRANGEMENT
Title (de)
ANORDNUNG ZUM GLEICHMÄSSIGEN UMSTRÖMEN EINER OBERFLÄCHE EINER EINER PROBE MIT FLÜSSIGKEIT UND VERWENDUNG DER ANORDNUNG
Title (fr)
DISPOSITIF PERMETTANT A UN LIQUIDE DE S'ECOULER UNIFORMEMENT SUR LA SURFACE D'UN ECHANTILLON ET UTILISATION DE CE DISPOSITIF
Publication
Application
Priority
- DE 0002704 W 20000810
- DE 19938409 A 19990813
Abstract (en)
[origin: WO0112882A1] The invention relates to an arrangement enabling a liquid (2) to flow evenly around a surface of a sample (3). Said arrangement has a flow chamber (1) through which a liquid (2) flows via inlet and outlet pipes (7, 8). The sample (3) can be rotated about an axis of rotation by means of a rotary drive (5). A filter (13) which extends crosswise to the direction of flow of the liquid (2) and which ensures that said liquid flows evenly through the inlet and outlet pipes (7, 8) is situated in front of said inlet and outlet pipes (7, 8). The inventive arrangement is especially suitable for precipitating a homogenous layer of a nickel/iron alloy on a silicon wafer (3). The invention also relates to the use of the inventive arrangement.
IPC 1-7
IPC 8 full level
C25D 5/08 (2006.01); C25D 7/12 (2006.01); H01L 21/28 (2006.01)
CPC (source: EP US)
C25D 5/08 (2013.01 - EP US); C25D 17/001 (2013.01 - EP US)
Citation (search report)
See references of WO 0112882A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 0112882 A1 20010222; DE 19938409 C1 20010322; DE 50001464 D1 20030417; EP 1204786 A1 20020515; EP 1204786 B1 20030312; US 6949172 B1 20050927
DOCDB simple family (application)
DE 0002704 W 20000810; DE 19938409 A 19990813; DE 50001464 T 20000810; EP 00963895 A 20000810; US 6917702 A 20020702