EP 1208047 A4 20040331 - INVERTED PRESSURE VESSEL WITH HORIZONTAL THROUGH LOADING
Title (en)
INVERTED PRESSURE VESSEL WITH HORIZONTAL THROUGH LOADING
Title (de)
UMGEKEHRTER DRUCKBEHÄLTER MIT HORIZONTALER LADEMÖGLICHKEIT
Title (fr)
RECIPIENT SOUS PRESSION INVERSE A CHARGEMENT A L'HORIZONTALE
Publication
Application
Priority
- US 0021338 W 20000804
- US 14725199 P 19990805
- US 15545499 P 19990920
Abstract (en)
[origin: WO0110733A1] A pressure vessel (1) for use in production processes requiring elevating and ranging of temperatures and pressures during the process cycle, readily adaptable to production line operation, suitable for wafer processing in the semiconductor industry and for other industries and processes. The pressure vessel (1) is configured within an open support frame (6) with a stationary, preferably inverted, orientation. The cover or closing plate (2) is vertically movable towards the mouth of the pressure vessel (1) and functions as the platform by which the object under process is transferred into the vessel (1). The moving and locking mechanism for the cover (2) is isolated and shielded from the process environment.
IPC 1-7
IPC 8 full level
B01J 3/00 (2006.01); B01J 3/06 (2006.01); B65D 51/00 (2006.01); F16J 13/02 (2006.01); F17C 13/06 (2006.01); H01L 21/00 (2006.01); H01L 21/677 (2006.01)
CPC (source: EP KR)
B01J 3/008 (2013.01 - EP); B01J 3/06 (2013.01 - EP); F17C 13/02 (2013.01 - KR); H01L 21/67126 (2013.01 - EP); H01L 21/67751 (2013.01 - EP)
Citation (search report)
- [X] EP 0841689 A2 19980513 - ASM JAPAN [JP]
- [X] EP 0623948 A1 19941109 - ASM JAPAN [JP]
- [X] US 5221019 A 19930622 - PECHACEK RAYMOND E [US], et al
- See references of WO 0110733A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 0110733 A1 20010215; AU 6893600 A 20010305; CN 1204024 C 20050601; CN 1368928 A 20020911; EP 1208047 A1 20020529; EP 1208047 A4 20040331; IL 147986 A0 20020912; JP 2003506646 A 20030218; KR 20020061589 A 20020724
DOCDB simple family (application)
US 0021338 W 20000804; AU 6893600 A 20000804; CN 00811332 A 20000804; EP 00957297 A 20000804; IL 14798600 A 20000804; JP 2001515214 A 20000804; KR 20027001586 A 20020205