EP 1209502 B1 20040825 - Method for the dynamic adjustment of the position of an element in an optical system
Title (en)
Method for the dynamic adjustment of the position of an element in an optical system
Title (de)
Verfahren zur dynamischen Manipulation der Position einer Baugruppe in einem optischen System
Title (fr)
Méthode d'ajustage dynamique de position d'un élément dans un système optique
Publication
Application
Priority
DE 10056782 A 20001116
Abstract (en)
[origin: DE10056782A1] Moved by actuators (3,4) with motion detectors (5), a subassembly (2) has its position determined by sensors (14,15) interconnected with the actuators and their detectors as control circuit. The actuators send an impulse to the subassembly. The impulse changes regarding its timing. A time-changeable speed profile preset and reliant on the detected position of the subassembly governs the motion of the actuators.
IPC 1-7
IPC 8 full level
B81B 7/00 (2006.01); B81C 99/00 (2010.01); G02B 7/02 (2006.01); G02B 7/08 (2006.01); G03F 7/20 (2006.01); G05D 3/12 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP KR US)
B81B 7/00 (2013.01 - KR); G02B 7/023 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR NL
DOCDB simple family (publication)
EP 1209502 A2 20020529; EP 1209502 A3 20030827; EP 1209502 B1 20040825; DE 10056782 A1 20020523; DE 50103386 D1 20040930; JP 2002361598 A 20021218; KR 20020038513 A 20020523; TW 519573 B 20030201; US 2002074529 A1 20020620; US 6759670 B2 20040706
DOCDB simple family (application)
EP 01126635 A 20011108; DE 10056782 A 20001116; DE 50103386 T 20011108; JP 2001351023 A 20011116; KR 20010070935 A 20011115; TW 90128467 A 20011116; US 263501 A 20011115