EP 1210208 A1 20020605 - MEMBRANE PROBING SYSTEM
Title (en)
MEMBRANE PROBING SYSTEM
Title (de)
MEMBRANFÜHLERSYSTEM
Title (fr)
SYSTEME DE CONTROLE DE MEMBRANE
Publication
Application
Priority
US 9916653 W 19990721
Abstract (en)
[origin: WO0107207A1] A substrate (200), preferably constructed of a ductile material and a tool (210) having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression (216) can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.
IPC 1-7
IPC 8 full level
H01L 21/66 (2006.01); G01R 1/067 (2006.01); G01R 1/073 (2006.01); G01R 3/00 (2006.01)
CPC (source: EP KR)
G01R 1/06733 (2013.01 - KR); G01R 1/06744 (2013.01 - EP); G01R 1/06755 (2013.01 - KR); G01R 1/0735 (2013.01 - EP KR); G01R 3/00 (2013.01 - KR); G01R 31/2851 (2013.01 - KR); G01R 3/00 (2013.01 - EP)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 0107207 A1 20010201; AU 5224499 A 20010213; CN 1174836 C 20041110; CN 1361725 A 20020731; EP 1210208 A1 20020605; EP 1210208 A4 20050706; JP 2003505871 A 20030212; KR 100724131 B1 20070604; KR 20020027483 A 20020413
DOCDB simple family (application)
US 9916653 W 19990721; AU 5224499 A 19990721; CN 99816816 A 19990721; EP 99937404 A 19990721; JP 2001512067 A 19990721; KR 20027000301 A 20020109