EP 1218264 A4 20070926 - TRANSPORT MODULE WITH LATCHING DOOR
Title (en)
TRANSPORT MODULE WITH LATCHING DOOR
Title (de)
TRANSPORTMODUL MIT TÜRVERRIEGELUNG
Title (fr)
MODULE DE TRANSPORT A VOLET DE BLOCAGE
Publication
Application
Priority
- US 0018511 W 20000706
- US 14283199 P 19990708
Abstract (en)
[origin: WO0104022A1] A wafer container with door receiving frame and a door sized therefor. The door (94) includes latching linkages (250, 252) that extend, lift, lower and retract latching portions from the door and into and out of latch receptacles (150) in the door frame. Each latching mechanism utilizes a sliding plate (210) with a connected handle (170, 172) exposed on the front of the door. The sliding plate has lifting linkages (220, 222) cooperating with the latching linkages. Moving the handles extends the latching portions into the latching receptacles. By way of a ramped surface (226) and follower surface (277) on the overlapping linkages, the latching portions then move in a direction normal to the first direction to pull the door inwardly and seal the door to the container. The sliding plate includes a rack portion (224) engaged with a pinion (290). The pinion is accessible from the door front by a latch key (300).
IPC 8 full level
H01L 21/00 (2006.01); H01L 21/673 (2006.01)
CPC (source: EP KR)
B65D 85/30 (2013.01 - KR); H01L 21/67373 (2013.01 - EP)
Citation (search report)
- [X] EP 0899202 A1 19990303 - SHINETSU POLYMER CO [JP], et al
- [PX] WO 9933726 A1 19990708 - ASYST TECHNOLOGIES [US]
- See references of WO 0104022A1
Designated contracting state (EPC)
DE FR GB IE NL
DOCDB simple family (publication)
WO 0104022 A1 20010118; WO 0104022 B1 20010215; AU 6341900 A 20010130; CN 1169696 C 20041006; CN 1378515 A 20021106; DE 10084776 T5 20051201; EP 1218264 A1 20020703; EP 1218264 A4 20070926; JP 2003504886 A 20030204; JP 4549595 B2 20100922; KR 100747041 B1 20070807; KR 20020063155 A 20020801; MY 128807 A 20070228
DOCDB simple family (application)
US 0018511 W 20000706; AU 6341900 A 20000706; CN 00811582 A 20000706; DE 10084776 T 20000706; EP 00950296 A 20000706; JP 2001509652 A 20000706; KR 20027000227 A 20020108; MY PI20003119 A 20000707