EP 1218291 A1 20020703 - METHOD FOR PRODUCING HIGH-PURITY HYDROCHLORIC ACID
Title (en)
METHOD FOR PRODUCING HIGH-PURITY HYDROCHLORIC ACID
Title (de)
VERFAHREN ZUR HERSTELLUNG HOCHREINER SALZSAÜRE
Title (fr)
PROCEDE DE PREPARATION D'ACIDE CHLORHYDRIQUE EXTREMEMENT PUR
Publication
Application
Priority
- DE 19948206 A 19991007
- EP 0009678 W 20001004
Abstract (en)
[origin: DE19948206A1] The invention relates to a novel method, which can be carried out according to industrial standards, for producing high-purity hydrochloric acid with a very low particle content, for use in the production of semiconductors.
IPC 1-7
IPC 8 full level
C01B 7/01 (2006.01); C01B 7/07 (2006.01); H01L 21/00 (2006.01)
CPC (source: EP KR US)
C01B 7/01 (2013.01 - KR); C01B 7/0706 (2013.01 - EP US); C01B 7/0737 (2013.01 - EP US); H01L 21/00 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
DE 19948206 A1 20010412; AU 7524800 A 20010510; CA 2387584 A1 20010412; CN 100473600 C 20090401; CN 1377323 A 20021030; EP 1218291 A1 20020703; JP 2003511329 A 20030325; JP 4718077 B2 20110706; KR 100742477 B1 20070725; KR 20020048949 A 20020624; MY 128168 A 20070131; TW 539646 B 20030701; US 6793905 B1 20040921; WO 0125144 A1 20010412
DOCDB simple family (application)
DE 19948206 A 19991007; AU 7524800 A 20001004; CA 2387584 A 20001004; CN 00813864 A 20001004; EP 0009678 W 20001004; EP 00964269 A 20001004; JP 2001528103 A 20001004; KR 20027004429 A 20020404; MY PI20004651 A 20001005; TW 89120579 A 20001003; US 11006402 A 20020408