EP 1218790 A2 20020703 - MICROELECTROMECHANICAL DEVICE WITH MOVING ELEMENT
Title (en)
MICROELECTROMECHANICAL DEVICE WITH MOVING ELEMENT
Title (de)
MIKROELEKROMECHANISCHE VORRICHTUNG MIT BEWEGLICHEM ELEMENT
Title (fr)
DISPOSITIF MICRO-ELECTROMECANIQUE A ELEMENT MOBILE
Publication
Application
Priority
- IL 0000431 W 20000720
- US 14462899 P 19990720
- US 17049299 P 19991213
- US 17049499 P 19991213
Abstract (en)
[origin: WO0106543A2] A microelectromechanical (MEMS) device has a substrate, and a generally planar moving element, such as a mirror, disposed in parallel to the surface of the substrate. An actuator is operatively engageable with the moving element for selectively actuating the moving element between a first position in a plane horizontal to the surface of the substrate and a second position in that plane. The MEMS device may be effectively used as an optical switch. Various different actuators can be used. Preferably, the device is fabricated using a surface micromachining process.
[origin: WO0106543A2] A microelectromechanical (MEMS) device (100) has a substrate (102) and a generally planar moving element (106), such as a mirror, disposed in parallel to the surface (108) of the substrate. An actuator is operatively engageable with the moving element (106) for selectively actuating the moving element (106) between a first position in a plane horizontal to the surface of the substrate and a second position in that plane. The MEMS device (100) may be effectively used as an optical switch. Various different actuators can be used. Preferably, the device is fabricated using a surface micromachining process.
IPC 1-7
IPC 8 full level
G02B 26/02 (2006.01); B81B 3/00 (2006.01); B81B 7/02 (2006.01); B81C 1/00 (2006.01); B81C 3/00 (2006.01); G02B 6/26 (2006.01); G02B 6/35 (2006.01); G02B 26/08 (2006.01); H04Q 11/00 (2006.01); B81C 99/00 (2010.01); G02B 6/42 (2006.01)
CPC (source: EP)
B81B 3/0021 (2013.01); B81C 1/00214 (2013.01); G02B 6/266 (2013.01); G02B 6/3518 (2013.01); H04Q 11/0005 (2013.01); B81B 2201/045 (2013.01); B81B 2203/051 (2013.01); G02B 6/3514 (2013.01); G02B 6/3556 (2013.01); G02B 6/357 (2013.01); G02B 6/3572 (2013.01); G02B 6/3576 (2013.01); G02B 6/3578 (2013.01); G02B 6/3584 (2013.01); G02B 6/423 (2013.01); H01H 2001/0084 (2013.01); H04Q 2011/0026 (2013.01); H04Q 2011/003 (2013.01); H04Q 2011/0056 (2013.01); H04Q 2011/0058 (2013.01)
Citation (search report)
See references of WO 0106543A2
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL
DOCDB simple family (publication)
WO 0106543 A2 20010125; WO 0106543 A3 20010525; AU 6012500 A 20010205; CA 2379537 A1 20010125; EP 1218790 A2 20020703; IL 147475 A0 20020814; JP 2003523833 A 20030812
DOCDB simple family (application)
IL 0000431 W 20000720; AU 6012500 A 20000720; CA 2379537 A 20000720; EP 00946255 A 20000720; IL 14747500 A 20000720; JP 2001511714 A 20000720