EP 1218799 A1 20020703 - SHIELDING AGAINST EXTERNAL EXCITATIONS WHILE MEASURING OSCILLATORY SEMICONDUCTOR MEMBRANES
Title (en)
SHIELDING AGAINST EXTERNAL EXCITATIONS WHILE MEASURING OSCILLATORY SEMICONDUCTOR MEMBRANES
Title (de)
ABSCHIRMUNG ÄUSSERER ANREGUNGEN BEI DER VERMESSUNG SCHWINGUNGSFÄHIGER HALBLEITERMEMBRANEN
Title (fr)
PROTECTION CONTRE LES EXCITATIONS EXTERIEURES LORS DE LA MESURE DE MEMBRANES OSCILLANTES DE SEMICONDUCTEUR
Publication
Application
Priority
- DE 19944474 A 19990916
- EP 0008791 W 20000908
Abstract (en)
[origin: WO0120399A1] The invention relates to a method for optically measuring an oscillatory and preferably structured membrane (4) in an environment which is subjected to gas flows and/or acoustic excitations, and in which a device for measuring the membrane is focused on the same. The invention is characterized in that an optically transparent film is provided, and the film (5) and the membrane are arranged in such a manner that the gas flows and/or the acoustic excitations reach the membrane only by passing through the film. The film enables a diminishing of the external air movements and thus oscillations of the membrane so that the membrane can be precisely measured.
IPC 1-7
IPC 8 full level
G03F 1/00 (2012.01); H01L 21/027 (2006.01)
CPC (source: EP US)
G03F 1/20 (2013.01 - EP US); G03F 1/62 (2013.01 - EP US); G03F 1/84 (2013.01 - EP US)
Citation (search report)
See references of WO 0120399A1
Designated contracting state (EPC)
DE FR GB IE IT
DOCDB simple family (publication)
WO 0120399 A1 20010322; DE 19944474 A1 20010531; DE 19944474 C2 20011031; EP 1218799 A1 20020703; JP 2003509859 A 20030311; TW 480371 B 20020321; US 2002167666 A1 20021114; US 6662661 B2 20031216
DOCDB simple family (application)
EP 0008791 W 20000908; DE 19944474 A 19990916; EP 00964148 A 20000908; JP 2001523921 A 20000908; TW 89118800 A 20000914; US 10024302 A 20020318