EP 1220262 B1 20070523 - Method of manufacturing a cathode with aligned extraction- and focusing grid
Title (en)
Method of manufacturing a cathode with aligned extraction- and focusing grid
Title (de)
Verfahren zur Herstellung einer Kathode mit aligniertem extraktions- und Fokussierungsgitter
Title (fr)
Procédé de fabrication d'une cathode à grille d'extraction et grille de focalisation alignées
Publication
Application
Priority
FR 0016979 A 20001222
Abstract (en)
[origin: EP1220262A1] Method for fabricating a structure involves: forming on a substrate, first insulating layer, first level of metallization, second insulating layer and second level of metallization; opening first and second windows; forming third windows; engraving first level of metallization; engraving first insulating layer and simultaneously eliminating second insulating layer inside contour of second windows. A method for the fabrication of a structure consists of: (a) forming on a substrate (1) a pile of a first insulating layer (7), a first level of metallization (6), a second insulating layer (8) and a second level of metallization (9); (b) opening, in the second level of metallization and the second insulating layer, some first windows corresponding to the contour of the first openings and some second windows of which the external contour corresponds to the internal contour of the second openings; (c) forming in a masking layer (20) some third windows overlapping the first windows: (d) engraving the first level of metallization under the masking layer up to the internal periphery of the second windows; (e) engraving to a chosen distance the first insulating layer and simultaneously eliminating the second insulating layer inside the contour of the second windows; (f) and eliminating the masking layer.
IPC 8 full level
H01J 9/02 (2006.01)
CPC (source: EP US)
H01J 9/025 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
EP 1220262 A1 20020703; EP 1220262 B1 20070523; DE 60128534 D1 20070705; DE 60128534 T2 20080131; FR 2818797 A1 20020628; FR 2818797 B1 20030606; JP 2002231126 A 20020816; JP 3960036 B2 20070815; US 2002114882 A1 20020822; US 6911154 B2 20050628
DOCDB simple family (application)
EP 01410165 A 20011221; DE 60128534 T 20011221; FR 0016979 A 20001222; JP 2001389100 A 20011221; US 2990201 A 20011221