Global Patent Index - EP 1220285 A3

EP 1220285 A3 20050316 - Ion source in which a UV/VUV light source is used for ionization

Title (en)

Ion source in which a UV/VUV light source is used for ionization

Title (de)

Ionenquelle, bei der UV/VUV-Licht zur Ionisation verwendet wird

Title (fr)

Source d' ions dans laquelle une source de lumière UV/VUV est utilisée pour l' ionisation

Publication

EP 1220285 A3 20050316 (DE)

Application

EP 01120299 A 20010824

Priority

DE 10044655 A 20000909

Abstract (en)

[origin: DE10044655A1] The ion source has an ionisation chamber and a UV/VUV-excimer light source for generating ions by directing light into a sample gas. The light source is provided by a deuterium lamp, a micro hollow cathode lamp, a micro point lamp, a DC discharge lamp, a barrier discharge lamp, or an electron beam UV/VUV lamp, with an electron gun (1), a membrane (3) between the electron gun and a gas space (9) containing a rare earth gas or gas mixture and optical elements (11,12) for imaging the light emission volume into the ionisation space (14).

IPC 1-7

H01J 49/16; H01J 27/24

IPC 8 full level

H01J 49/16 (2006.01); H01J 49/40 (2006.01)

CPC (source: EP)

H01J 49/162 (2013.01)

Citation (search report)

  • [A] US 6052401 A 20000418 - WIESER JOCHEN [DE], et al
  • [A] EP 0585487 A1 19940309 - MINE SAFETY APPLIANCES CO [US]
  • [A] EP 0921393 A2 19990609 - GSF FORSCHUNGSZENTRUM UMWELT [DE]
  • [DA] WIESER J ET AL: "VACUUM ULTRAVIOLET RARE GAS EXCIMER LIGHT SOURCE", REVIEW OF SCIENTIFIC INSTRUMENTS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 68, no. 3, March 1997 (1997-03-01), pages 1360 - 1364, XP000685060, ISSN: 0034-6748
  • [DA] SALVERMOSER M ET AL: "Energy flow and excimer yields in continuous wave rare gas–halogen systems", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 88, no. 1, 1 July 2000 (2000-07-01), pages 453 - 459, XP012050818, ISSN: 0021-8979
  • [DA] EL-HABACHI AHMED ET AL: "Emission of excimer radiation from direct current, high-pressure hollow cathode discharges", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 72, no. 1, 5 January 1998 (1998-01-05), pages 22 - 24, XP012019726, ISSN: 0003-6951
  • [DA] GELLERT B ET AL: "GENERATION OF EXCIMER EMISSION IN DIELECTRIC BARRIER DISCHARGES", APPLIED PHYSICS B. PHOTOPHYSICS AND CHEMISTRY, SPRINGER VERLAG. HEIDELBERG, DE, vol. B52, no. 1, January 1991 (1991-01-01), pages 14 - 21, XP000209199
  • [A] BOBELDIJK M ET AL: "TESTING THE PERFORMANCE OF A VUV PHOTOIONIZATION SOURCE ON A DOUBLE FOCUSSING MASS SPECTROMETER USING ALKANES AND THIOPHENES", INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, ELSEVIER SCIENTIFIC PUBLISHING CO. AMSTERDAM, NL, vol. 110, no. 3, 2 December 1991 (1991-12-02), pages 179 - 194, XP000247041, ISSN: 0168-1176
  • [A] GENUIT W. ET AL.: "SELECTIVE ION SOURCE FOR TRACE GAS ANALSIS", INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PHYSICS, vol. 51, 1983, AMSTERDAM, pages 207 - 213, XP009042676
  • [A] GONTHIEZ T ET AL: "VUV laser photoionization of laser-stimulated desorbed species", APPLIED PHYSICS A: MATERIALS SCIENCE AND PROCESSING, SPRINGER VERLAG, BERLIN, DE, vol. A69, suppl, 19 July 1999 (1999-07-19), pages 171 - 173, XP002175581, ISSN: 0947-8396

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

DOCDB simple family (publication)

DE 10044655 A1 20020404; EP 1220285 A2 20020703; EP 1220285 A3 20050316; EP 1220285 B1 20140820

DOCDB simple family (application)

DE 10044655 A 20000909; EP 01120299 A 20010824