EP 1220285 B1 20140820 - Ion source in which a UV/VUV light source is used for ionization
Title (en)
Ion source in which a UV/VUV light source is used for ionization
Title (de)
Ionenquelle, bei der UV/VUV-Licht zur Ionisation verwendet wird
Title (fr)
Source d' ions dans laquelle une source de lumière UV/VUV est utilisée pour l' ionisation
Publication
Application
Priority
DE 10044655 A 20000909
Abstract (en)
[origin: DE10044655A1] The ion source has an ionisation chamber and a UV/VUV-excimer light source for generating ions by directing light into a sample gas. The light source is provided by a deuterium lamp, a micro hollow cathode lamp, a micro point lamp, a DC discharge lamp, a barrier discharge lamp, or an electron beam UV/VUV lamp, with an electron gun (1), a membrane (3) between the electron gun and a gas space (9) containing a rare earth gas or gas mixture and optical elements (11,12) for imaging the light emission volume into the ionisation space (14).
IPC 8 full level
H01J 49/16 (2006.01); H01J 27/24 (2006.01); H01J 49/40 (2006.01)
CPC (source: EP)
H01J 49/162 (2013.01)
Citation (examination)
EP 0578953 A1 19940119 - HERAEUS NOBLELIGHT GMBH [DE]
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
DE 10044655 A1 20020404; EP 1220285 A2 20020703; EP 1220285 A3 20050316; EP 1220285 B1 20140820
DOCDB simple family (application)
DE 10044655 A 20000909; EP 01120299 A 20010824