EP 1227060 A3 20041229 - Micromechanical device and process for its manufacture
Title (en)
Micromechanical device and process for its manufacture
Title (de)
Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren
Title (fr)
Dispositf microméchanique et son procédé de fabrication
Publication
Application
Priority
DE 10103399 A 20010126
Abstract (en)
[origin: EP1227060A2] The micromechanical component has a substrate in which at least two current channels (10, 10') are provided. The channels have a common input (5) and then branch out separately. The input has a branching with a peak (P) where the inner walls of the channels separate. A first electrode (20) is provided to apply a first electric potential to the inner walls of the channels. A second electrode (30) applies a second electric potential to the outer walls of the channels. The channels may then recombine to have a commom output. Independent claims also cover a method of manufacturing the components by etching.
IPC 1-7
IPC 8 full level
B81B 1/00 (2006.01); F04B 17/00 (2006.01); F04B 19/00 (2006.01)
CPC (source: EP)
F04B 17/00 (2013.01); F04B 19/006 (2013.01)
Citation (search report)
- [A] WO 9639252 A1 19961212 - SARNOFF DAVID RES CENTER [US]
- [Y] WO 0011477 A1 20000302 - SIEMENS AG [DE], et al
- [E] WO 0236484 A1 20020510 - BOSCH GMBH ROBERT [DE], et al
- [Y] US 5482598 A 19960109 - ISAKA KAZUO [JP], et al
- [XY] MORISHIMA K ET AL: "Noncontact transportation of DNA molecule by dielectrophoretic force", MHS'95. IEEE PROCEEDINGS OF THE SIXTH INTERNATIONAL SYMPOSIUM ON MICRO MACHINE AND HUMAN SCIENCE (CAT. NO.95TH8079) 4-6 OCT. 1995, NAGOYA, JAPAN, 1995, NEW YORK, NY, USA, pages 145 - 152, XP010159960, ISBN: 0-7803-2676-8
- [A] MORISHIMA K ET AL: "Microflow system and transportation of DNA molecule by dielectrophoretic force utilizing the conformational transition in the higher order structure of DNA molecule", PROCEEDINGS IEEE. THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS. AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS (CAT. NO.97CH36021) 26-30 JAN. 1997, NAGOYA, JAPAN, 1997, NEW YORK, NY, USA, pages 389 - 394, XP010216938, ISBN: 0-7803-3744-1
- [A] TJERKSTRA R W ET AL: "Multi-walled microchannels: free-standing porous silicon membranes for use in mu TAS", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE INC. NEW YORK, US, vol. 9, no. 4, December 2000 (2000-12-01), pages 495 - 501, XP002212547, ISSN: 1057-7157
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
EP 1227060 A2 20020731; EP 1227060 A3 20041229; EP 1227060 B1 20141210; DE 10103399 A1 20020822
DOCDB simple family (application)
EP 01123641 A 20011002; DE 10103399 A 20010126