EP 1228159 A1 20020807 - IMPROVED CMP PRODUCTS
Title (en)
IMPROVED CMP PRODUCTS
Title (de)
VERBESSERTES CHEMISCH-MECHANISCHES POLIERVERFAHREN
Title (fr)
PRODUITS DE PLANARISATION MECANO-CHIMIQUE AMELIORES
Publication
Application
Priority
- US 0023797 W 20000830
- US 41947799 A 19991015
Abstract (en)
[origin: WO0129145A1] Abrasive materials comprising silica-coated transitional alumina particles with an average particle size of less than 50 nanometers and a BET surface area of at least 50 m2/gm are useful in CMP processes either in the form of slurries or as fixed abrasives.
IPC 1-7
IPC 8 full level
B24B 57/02 (2006.01); B24B 37/24 (2012.01); B24D 3/00 (2006.01); B24D 3/28 (2006.01); B24D 3/34 (2006.01); C09G 1/02 (2006.01); C09K 3/14 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP KR)
B24B 37/245 (2013.01 - EP KR); B24D 3/28 (2013.01 - EP); B24D 3/34 (2013.01 - EP); C09K 3/1445 (2013.01 - EP KR); C09K 3/1463 (2013.01 - EP KR); C01P 2004/64 (2013.01 - KR); C01P 2006/12 (2013.01 - KR); H01L 21/3212 (2013.01 - KR); Y10S 977/775 (2013.01 - KR); Y10S 977/888 (2013.01 - KR)
Citation (search report)
See references of WO 0129145A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 0129145 A1 20010426; AU 7090000 A 20010430; AU 754328 B2 20021114; BR 0014755 A 20020924; CA 2383504 A1 20010426; CN 1379803 A 20021113; EP 1228159 A1 20020807; JP 2003512501 A 20030402; KR 20020042869 A 20020607; MX PA02003753 A 20020830
DOCDB simple family (application)
US 0023797 W 20000830; AU 7090000 A 20000830; BR 0014755 A 20000830; CA 2383504 A 20000830; CN 00814323 A 20000830; EP 00959610 A 20000830; JP 2001531935 A 20000830; KR 20027004829 A 20020415; MX PA02003753 A 20000830