EP 1230674 A1 20020814 - CROSSLINKED RESIN AND METHOD FOR MAKING OXIDES USING SAME
Title (en)
CROSSLINKED RESIN AND METHOD FOR MAKING OXIDES USING SAME
Title (de)
VERNETZT POLYMERISIERTE HARZE UND VERWENDUNG DERSELBEN FÜR DIE HERSTELLUNG VON OXIDEN
Title (fr)
RESINE RETICULEE ET PROCEDE DE FABRICATION D'OXYDES UTILISANT CETTE RESINE RETICULEE
Publication
Application
Priority
- FR 0102189 W 20010706
- FR 0008920 A 20000707
Abstract (en)
[origin: WO0205340A1] The invention concerns a crosslinked resin and its use for making ceramic or glass patterns at the surface of a substrate. Said resin is obtained by mixing in a solvent one or several simple or complex metal or silicon alkoxides, acetylacetone and hexamethylene tetramine, then heating and subjecting said mixture to an exposure. The invention is applicable to ferroelectric storage units, integrated capacitors, piezoelectric transducers.
IPC 1-7
IPC 8 full level
H01L 21/316 (2006.01); H01L 21/02 (2006.01); H01L 21/314 (2006.01)
CPC (source: EP US)
H01L 21/02282 (2013.01 - EP US); H01L 21/31691 (2013.01 - US); H01L 21/02197 (2013.01 - EP US); H01L 28/55 (2013.01 - EP US)
Designated contracting state (EPC)
DE GB IT
DOCDB simple family (publication)
WO 0205340 A1 20020117; EP 1230674 A1 20020814; FR 2811317 A1 20020111; FR 2811317 B1 20021011; US 2002135001 A1 20020926
DOCDB simple family (application)
FR 0102189 W 20010706; EP 01954061 A 20010706; FR 0008920 A 20000707; US 6995102 A 20020307