EP 1234982 A1 20020828 - Vacuum pump
Title (en)
Vacuum pump
Title (de)
Vakuumpumpe
Title (fr)
Pompe à vide
Publication
Application
Priority
EP 01830121 A 20010222
Abstract (en)
A turbomolecular vacuum pump (5) comprises a first pumping section (1) having pumping stages with bladed rotor discs, a second pumping section (2) having pumping stages with smooth rotor discs, a third pumping section (3) having a pumping stage with a toothed rotor disc (26), and a fourth pumping section (4) of the ejector or venturi pump type. <IMAGE>
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01); F04D 25/16 (2006.01); F04F 5/04 (2006.01)
CPC (source: EP)
F04D 19/046 (2013.01); F04D 25/16 (2013.01); F04F 5/04 (2013.01)
Citation (applicant)
- EP 0445855 B1 19941026 - VARIAN SPA [IT]
- EP 0256234 A2 19880224 - HITACHI LTD [JP]
Citation (search report)
- [AD] EP 0445855 A1 19910911 - VARIAN SPA [IT]
- [AD] US 4797068 A 19890110 - HAYAKAWA TADASHI [JP], et al
- [A] US 5118251 A 19920602 - SAULGEOT CLAUDE [FR]
- [A] EP 0340685 A2 19891108 - NIPPON FERROFLUIDICS KK [JP]
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
EP 1234982 A1 20020828; EP 1234982 B1 20031203; DE 60101368 D1 20040115; DE 60101368 T2 20041014
DOCDB simple family (application)
EP 01830121 A 20010222; DE 60101368 T 20010222