Global Patent Index - EP 1235653 A1

EP 1235653 A1 2002-09-04 - IMPROVEMENTS IN DRYING AND CLEANING OBJECTS USING CONTROLLED AEROSOLS AND GASES

Title (en)

IMPROVEMENTS IN DRYING AND CLEANING OBJECTS USING CONTROLLED AEROSOLS AND GASES

Title (de)

VERBESSERUNGEN BEI DER TROCKNUNG UND REINIGUNG VON KÖRPERN UNTER VERWENDUNG VON AEROSOLEN UND GASEN

Title (fr)

AMELIORATIONS APPORTEES AU SECHAGE ET AU NETTOYAGE D'OBJETS A L'AIDE D'AEROSOLS ET DE GAZ CONTROLES

Publication

EP 1235653 A1 (EN)

Application

EP 99954861 A

Priority

US 9923749 W

Abstract (en)

[origin: WO0126830A1] Method and apparatus for cleaning and/or drying objects that may have been wetted or contaminated in a manufacturing process. The objects are submerged in a rinse liquid (27) in an enclosed chamber (11), and aerosol particles (39) from a selected liquid (37) are introduced into the chamber above the rinse liquid surface (29), forming a thin film (30) on this surface. As the rinse liquid is slowly drained (41), some aerosol particles settle onto the exposed surfaces (14A, 14B, 14C) of the objects, and displace and remove rinse liquid residues from the exposed surfaces by a "chemical squeegeeing" effect. Surface contaminants are also removed by this process. Chamber pressure is maintained at or near the external environment pressure as the rinse liquid is drained from the chamber. Inert gas flow is employed to provide aerosol particles of smaller size and/or with greater dispersion within the chamber. Continuous filtering and shunt filtering (159, 161, 175) are employed to remove most contaminants from the selected liquid. A flow deflector redirects initial flow of the selected liquid to a supplementary filter, to remove most of the contaminant particle "spike" that appears when a system is first (re)activated. An improved surface for aerosol particle production is provided.

IPC 1-7 (main, further and additional classification)

B08B 9/20

IPC 8 full level (invention and additional information)

B08B 3/02 (2006.01); B05B 3/14 (2006.01); B05B 17/06 (2006.01); B05C 3/09 (2006.01); B05C 11/10 (2006.01); B05C 15/00 (2006.01); B05D 1/18 (2006.01); B05D 3/10 (2006.01); B05D 3/12 (2006.01); B08B 3/12 (2006.01); B08B 9/20 (2006.01); F26B 21/14 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01); H01L 21/00 (2006.01)

CPC (invention and additional information)

H01L 21/02052 (2013.01); B08B 3/12 (2013.01); B08B 2203/002 (2013.01); H01L 21/67051 (2013.01)

Citation (search report)

See references of WO 0126830A1

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

WO 0126830 A1 20010419; AU 1110400 A 20010423; CN 1276804 C 20060927; CN 1398206 A 20030219; EP 1235653 A1 20020904; JP 2003517917 A 20030603

INPADOC legal status


2004-10-06 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20030503

2002-09-04 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20020510

2002-09-04 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE