EP 1235653 A1 20020904 - IMPROVEMENTS IN DRYING AND CLEANING OBJECTS USING CONTROLLED AEROSOLS AND GASES
Title (en)
IMPROVEMENTS IN DRYING AND CLEANING OBJECTS USING CONTROLLED AEROSOLS AND GASES
Title (de)
VERBESSERUNGEN BEI DER TROCKNUNG UND REINIGUNG VON KÖRPERN UNTER VERWENDUNG VON AEROSOLEN UND GASEN
Title (fr)
AMELIORATIONS APPORTEES AU SECHAGE ET AU NETTOYAGE D'OBJETS A L'AIDE D'AEROSOLS ET DE GAZ CONTROLES
Publication
Application
Priority
US 9923749 W 19991012
Abstract (en)
[origin: WO0126830A1] Method and apparatus for cleaning and/or drying objects that may have been wetted or contaminated in a manufacturing process. The objects are submerged in a rinse liquid (27) in an enclosed chamber (11), and aerosol particles (39) from a selected liquid (37) are introduced into the chamber above the rinse liquid surface (29), forming a thin film (30) on this surface. As the rinse liquid is slowly drained (41), some aerosol particles settle onto the exposed surfaces (14A, 14B, 14C) of the objects, and displace and remove rinse liquid residues from the exposed surfaces by a "chemical squeegeeing" effect. Surface contaminants are also removed by this process. Chamber pressure is maintained at or near the external environment pressure as the rinse liquid is drained from the chamber. Inert gas flow is employed to provide aerosol particles of smaller size and/or with greater dispersion within the chamber. Continuous filtering and shunt filtering (159, 161, 175) are employed to remove most contaminants from the selected liquid. A flow deflector redirects initial flow of the selected liquid to a supplementary filter, to remove most of the contaminant particle "spike" that appears when a system is first (re)activated. An improved surface for aerosol particle production is provided.
IPC 1-7
IPC 8 full level
B05B 3/14 (2006.01); B05B 17/06 (2006.01); B05C 3/09 (2006.01); B05C 11/10 (2006.01); B05C 15/00 (2006.01); B05D 1/18 (2006.01); B05D 3/10 (2006.01); B05D 3/12 (2006.01); B08B 3/02 (2006.01); B08B 3/12 (2006.01); B08B 9/20 (2006.01); F26B 21/14 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01); H01L 21/00 (2006.01)
CPC (source: EP KR)
B08B 3/12 (2013.01 - EP); H01L 21/02052 (2013.01 - EP); H01L 21/304 (2013.01 - KR); B08B 2203/002 (2013.01 - EP); H01L 21/67051 (2013.01 - EP)
Citation (search report)
See references of WO 0126830A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 0126830 A1 20010419; AU 1110400 A 20010423; CN 1276804 C 20060927; CN 1398206 A 20030219; EP 1235653 A1 20020904; JP 2003517917 A 20030603; KR 100604458 B1 20060726; KR 20020068034 A 20020824
DOCDB simple family (application)
US 9923749 W 19991012; AU 1110400 A 19991012; CN 99817012 A 19991012; EP 99954861 A 19991012; JP 2001529882 A 19991012; KR 20027004730 A 20020412