Global Patent Index - EP 1235947 A1

EP 1235947 A1 2002-09-04 - METHOD AND APPARATUS FOR SUBSTRATE BIASING IN MULTIPLE ELECTRODE SPUTTERING SYSTEMS

Title (en)

METHOD AND APPARATUS FOR SUBSTRATE BIASING IN MULTIPLE ELECTRODE SPUTTERING SYSTEMS

Title (de)

VERFAHREN UND VORRICHTUNG ZUR POLARISATION VON SUBSTRAT IN MEHRFACHELEKTRODEN-SPUTTERING-SYSTEMEN

Title (fr)

TECHNIQUE ET DISPOSITIF DE POLARISATION DU SUBSTRAT DANS DES SYSTEMES DE PULVERISATION A ELECTRODES IN MULTIPLES

Publication

EP 1235947 A1 (EN)

Application

EP 00970916 A

Priority

  • US 0028482 W
  • US 15989699 P

Abstract (en)

[origin: WO0129278A1] A method and an apparatus are disclosed for causing ion bombardment of the substrate (3) during sputter deposition of an insulating or conducting material on a substrate (3) when using dual cathode (9, 10) or dual anode sputtering approaches. A novel electrical circuit including a center-tapped transformer (17) is disclosed to permit a controllable potential to be applied to the substrate (3) relative to the plasma potential, without the necessity of an additional power supply. Also disclosed are approaches which permit the use of an biasing supply (19 or 20), either dc or high frequency ac, and which can permit continuous discharging of the surface through alternate ion and electron bombardment.

IPC 1-7 (main, further and additional classification)

C23C 14/34

IPC 8 full level (invention and additional information)

C23C 14/34 (2006.01); H01L 21/31 (2006.01)

CPC (invention and additional information)

C23C 14/345 (2013.01); C23C 14/3464 (2013.01); H01J 37/32706 (2013.01); H01J 37/3444 (2013.01)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

EPO simple patent family

WO 0129278 A1 20010426; EP 1235947 A1 20020904; EP 1235947 A4 20090415; JP 2003512526 A 20030402

INPADOC legal status


2010-10-13 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20100403

2009-10-21 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20090922

2009-04-15 [A4] DESPATCH OF SUPPLEMENTARY SEARCH REPORT

- Effective date: 20090312

2002-09-04 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20020514

2002-09-04 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE