Global Patent Index - EP 1236906 A1

EP 1236906 A1 2002-09-04 - Turbomolecular pump

Title (en)

Turbomolecular pump

Title (de)

Turbomolekularpumpe

Title (fr)

Pompe turbomoléculaire

Publication

EP 1236906 A1 (DE)

Application

EP 02001844 A

Priority

DE 10107341 A

Abstract (en)

[origin: US2002114695A1] A vacuum pump including a housing having a suction opening in its high-vacuum region, a gas outlet opening in its high pressure region, pump-active cooperating rotor and stator components arranged in the housing for pumping gases from the suction opening to the outlet opening, with an end of the pump-active components adjoining the high pressure region being connected with the gas outlet opening via intermediate chamber, a heating device provided in the intermediate chamber and connected with stator components, which are located in the high pressure region, by a connection having a high thermal conductibility, and thermal resistance elements for separating the heating device from the housing.

Abstract (de)

Bei einer Vakuumpumpe werden Bauteile, die sich im Bereich höheren Druckes befinden und die durch Ablagerungen besonders bedroht sind, gezielt aufgeheizt. Dazu wird die Wärme mit Hilfe thermischer Anbindung gezielt an kritische Stellen gebracht. Bauteile, für die eine höhere Temperatur unerwünscht ist, werden durch Wärmeleitwiderstände (26, 27) von der Heizung (20) und den beheizten Teilen isoliert.

IPC 1-7 (main, further and additional classification)

F04D 19/04

IPC 8 full level (invention and additional information)

F04D 19/04 (2006.01); F04D 29/58 (2006.01)

CPC (invention and additional information)

F04D 19/04 (2013.01); F04D 29/584 (2013.01); F04D 29/5853 (2013.01); F05D 2260/607 (2013.01)

Citation (search report)

Designated contracting state (EPC)

CH DE FR GB IT LI NL

EPO simple patent family

EP 1236906 A1 20020904; EP 1236906 B1 20100707; DE 10107341 A1 20020829; DE 50214516 D1 20100819; JP 2002276586 A 20020925; JP 4673538 B2 20110420; US 2002114695 A1 20020822; US 6699009 B2 20040302

INPADOC legal status


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2010-08-19 [REF] CORRESPONDS TO:

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2009-09-30 [RTI1] TITLE (CORRECTION)

- Free text: TURBOMOLECULAR PUMP

2008-06-18 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20080515

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