EP 1236906 B1 20100707 - Turbomolecular pump
Title (en)
Turbomolecular pump
Title (de)
Turbomolekularpumpe
Title (fr)
Pompe turbomoléculaire
Publication
Application
Priority
DE 10107341 A 20010216
Abstract (en)
[origin: US2002114695A1] A vacuum pump including a housing having a suction opening in its high-vacuum region, a gas outlet opening in its high pressure region, pump-active cooperating rotor and stator components arranged in the housing for pumping gases from the suction opening to the outlet opening, with an end of the pump-active components adjoining the high pressure region being connected with the gas outlet opening via intermediate chamber, a heating device provided in the intermediate chamber and connected with stator components, which are located in the high pressure region, by a connection having a high thermal conductibility, and thermal resistance elements for separating the heating device from the housing.
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/58 (2006.01)
CPC (source: EP US)
F04D 19/04 (2013.01 - EP US); F04D 29/584 (2013.01 - EP US); F04D 29/5853 (2013.01 - EP); F05D 2260/607 (2013.01 - EP)
Designated contracting state (EPC)
CH DE FR GB IT LI NL
DOCDB simple family (publication)
EP 1236906 A1 20020904; EP 1236906 B1 20100707; DE 10107341 A1 20020829; DE 50214516 D1 20100819; JP 2002276586 A 20020925; JP 4673538 B2 20110420; US 2002114695 A1 20020822; US 6699009 B2 20040302
DOCDB simple family (application)
EP 02001844 A 20020126; DE 10107341 A 20010216; DE 50214516 T 20020126; JP 2002028220 A 20020205; US 7540902 A 20020213