EP 1238309 A1 20020911 - ULTRAVIOLET AND VACUUM ULTRAVIOLET TRANSPARENT POLYMER COMPOSITIONS AND THEIR USES
Title (en)
ULTRAVIOLET AND VACUUM ULTRAVIOLET TRANSPARENT POLYMER COMPOSITIONS AND THEIR USES
Title (de)
ULTRAVIOLET UND VAKUUM ULTRAVIOLET TERANSPARENTE POLYMERZUSAMMENSETZUNGEN UND DESSEN VERWENDUNGEN
Title (fr)
COMPOSITIONS POLYMERES TRANSPARENTES AU RAYONNEMENT ULTRAVIOLET ET ULTRAVIOLET EXTREME, ET LEURS UTILISATIONS
Publication
Application
Priority
- US 0031599 W 20001116
- US 16603799 P 19991117
Abstract (en)
[origin: WO0137044A1] Disclosed are partially fluorinated and fully fluorinated polymers that are substantially transparent to ultraviolet radiation at wavelengths from 140 to 186 nanometers.
IPC 1-7
IPC 8 full level
C08F 14/18 (2006.01); C08F 34/00 (2006.01); C08F 214/18 (2006.01); C08F 224/00 (2006.01); C08F 234/02 (2006.01); C09J 127/16 (2006.01); C09J 127/20 (2006.01); G02B 1/04 (2006.01); G03F 1/14 (2006.01); G03F 1/62 (2012.01); G03F 7/004 (2006.01); G03F 7/032 (2006.01); G03F 7/09 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP KR)
C08F 214/18 (2013.01 - EP); C08F 234/02 (2013.01 - EP); G03F 1/62 (2013.01 - EP); G03F 7/004 (2013.01 - KR); G03F 7/0046 (2013.01 - EP); G03F 7/091 (2013.01 - EP)
Citation (search report)
See references of WO 0137044A1
Designated contracting state (EPC)
AT BE CH CY DE FR GB IT LI NL
DOCDB simple family (publication)
WO 0137044 A1 20010525; CN 1391664 A 20030115; EP 1238309 A1 20020911; EP 1238310 A1 20020911; HK 1052751 A1 20030926; JP 2003514955 A 20030422; JP 2003514956 A 20030422; KR 20020053083 A 20020704; KR 20030008215 A 20030124; TW 594378 B 20040621; WO 0137043 A1 20010525
DOCDB simple family (application)
US 0031599 W 20001116; CN 00815896 A 20001116; EP 00979193 A 20001116; EP 00980452 A 20001116; HK 03105081 A 20030714; JP 2001539074 A 20001116; JP 2001539075 A 20001116; KR 20027006274 A 20020516; KR 20027006275 A 20020516; TW 89124424 A 20001117; US 0031560 W 20001116