Global Patent Index - EP 1238410 A1

EP 1238410 A1 2002-09-11 - DEVICE AND METHOD FOR ALIGNING DISC-SHAPED SUBSTRATES

Title (en)

DEVICE AND METHOD FOR ALIGNING DISC-SHAPED SUBSTRATES

Title (de)

VORRICHTUNG UND VERFAHREN ZUM AUSRICHTEN VON SCHEIBENFÖRMIGEN SUBSTRATEN

Title (fr)

DISPOSITIF ET PROCEDE POUR ORIENTER DES SUBSTRATS EN FORME DE DISQUES

Publication

EP 1238410 A1 (DE)

Application

EP 00981319 A

Priority

  • DE 19957758 A
  • EP 0011955 W

Abstract (en)

[origin: WO0141193A1] The invention relates to a simple and cost-effective method for aligning substrates. In order to achieve this, the invention provides a device for aligning disc-shaped substrates, in particular semiconductor wafers, comprising an alignment detection unit, at least one first support for receiving the substrate, which forms an oblique plane in relation to the horizontal, a stop against which the substrate can be displaced as a result of the oblique angle and a rotational device for rotating the substrate. The invention also relates to a method for aligning disc-shaped substrates, in particular semiconductor wafers, comprising the following steps: displacement of the substrate into an oblique position in relation to the horizontal, in which the substrate is held on a support which forms a tilted plane in relation to the horizontal and lies against a stop as a result of the oblique angle; rotation of the substrate into a predefined rotational position; and monitoring of the rotational position using a detection unit.

IPC 1-7 (main, further and additional classification)

H01L 21/00

IPC 8 full level (invention and additional information)

H01L 21/68 (2006.01)

CPC (invention and additional information)

H01L 21/68 (2013.01); Y10S 414/136 (2013.01)

Citation (search report)

See references of WO 0141193A1

Designated contracting state (EPC)

AT BE CH CY DE DK FR GB IE IT LI NL

EPO simple patent family

WO 0141193 A1 20010607; DE 19957758 A1 20010613; DE 19957758 C2 20011025; EP 1238410 A1 20020911; JP 2003515947 A 20030507; US 2002172585 A1 20021121; US 7004716 B2 20060228

INPADOC legal status


2006-10-25 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20060509

2004-05-19 [RBV] DESIGNATED CONTRACTING STATES (CORRECTION)

- Designated State(s): AT BE CH CY DE DK FR GB IE IT LI NL

2002-09-11 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20020613

2002-09-11 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR