EP 1238410 A1 20020911 - DEVICE AND METHOD FOR ALIGNING DISC-SHAPED SUBSTRATES
Title (en)
DEVICE AND METHOD FOR ALIGNING DISC-SHAPED SUBSTRATES
Title (de)
VORRICHTUNG UND VERFAHREN ZUM AUSRICHTEN VON SCHEIBENFÖRMIGEN SUBSTRATEN
Title (fr)
DISPOSITIF ET PROCEDE POUR ORIENTER DES SUBSTRATS EN FORME DE DISQUES
Publication
Application
Priority
- DE 19957758 A 19991201
- EP 0011955 W 20001129
Abstract (en)
[origin: WO0141193A1] The invention relates to a simple and cost-effective method for aligning substrates. In order to achieve this, the invention provides a device for aligning disc-shaped substrates, in particular semiconductor wafers, comprising an alignment detection unit, at least one first support for receiving the substrate, which forms an oblique plane in relation to the horizontal, a stop against which the substrate can be displaced as a result of the oblique angle and a rotational device for rotating the substrate. The invention also relates to a method for aligning disc-shaped substrates, in particular semiconductor wafers, comprising the following steps: displacement of the substrate into an oblique position in relation to the horizontal, in which the substrate is held on a support which forms a tilted plane in relation to the horizontal and lies against a stop as a result of the oblique angle; rotation of the substrate into a predefined rotational position; and monitoring of the rotational position using a detection unit.
IPC 1-7
IPC 8 full level
H01L 21/68 (2006.01)
CPC (source: EP KR US)
H01L 21/68 (2013.01 - EP KR US); H01L 21/68764 (2013.01 - KR); Y10S 414/136 (2013.01 - EP KR US)
Citation (search report)
See references of WO 0141193A1
Designated contracting state (EPC)
AT BE CH CY DE DK FR GB IE IT LI NL
DOCDB simple family (publication)
WO 0141193 A1 20010607; DE 19957758 A1 20010613; DE 19957758 C2 20011025; EP 1238410 A1 20020911; JP 2003515947 A 20030507; KR 100730428 B1 20070619; KR 20020059832 A 20020713; US 2002172585 A1 20021121; US 7004716 B2 20060228
DOCDB simple family (application)
EP 0011955 W 20001129; DE 19957758 A 19991201; EP 00981319 A 20001129; JP 2001542368 A 20001129; KR 20027007017 A 20020531; US 14865602 A 20020530